氣靜壓式精密單軸定位減振平台之設計開發與特性探討

Design and Development of a Uniaxial Precision Aerostatic Actuation Platform with Vibration Isolation and Research on Its Performance

賴垠宇(Yin-Yu, Lai)

指導教授 ： 黃光裕

國立臺灣大學/工學院/機械工程學研究所/碩士(2008年)

https://doi.org/10.6342/NTU.2008.00573

摘要

本論文整合矩形氣靜壓軸承及平行流場式精密調壓閥開發出高精密度位移致動平台。矩形氣靜壓軸承藉由分離式概念完成節流孔實體設計，其中雙列徑向複合節流孔可提供致動器抵抗外界力矩的能力，同時減少致動過程中的摩擦力，使致動精度提昇；而軸向孔口節流孔由於擁有高負載能力之特性，因此可配合輸入氣體壓力差達成致動平台往復致動的目標。平行流場式精密調壓閥採用改變長度及流道造型之概念來調整進入致動平台的氣體壓力。性能分析探討上則透過有限元素分析及實驗找出矩形氣靜壓軸承之負載能力與間隙關係，以及平行流場式精密調壓閥之輸出壓力差與作動角度之關係。

關鍵字

矩形氣靜壓軸承 ； 複合節流 ； 孔口節流 ； 致動器 ； 精密調壓閥

並列摘要

The thesis presents a design of a novel aerostatic linear actuation platform and precise pressure regulator. The rectangular aerostatic bearing is divided into three parts to accomplish the radial and axial restrictor. The radial compound restrictors in double rows have sufficient stiffness to against the pitching moment. Furthermore, the frictionless aerostatic film can support the actuator to increase the actuation accuracy. Two axial orifice restrictors provide outstanding loading capacity for the actuator and realize reciprocating actuation through regulation of their differential pressure. By using the parallel-field concept, the precise pressure regulator is accomplished through variation of length and shape of the flow channel, and it can further regulate the supply pressure for the actuator. For studying and verifying the performance, the finite element analyses and the experiments are carried out to find out the relationship between the loading capacity and the air gap, and the relationship between the differential pressure and the regulating angle of the precision pressure regulator.

並列關鍵字

rectangular aerostatic bearing ； compound restrictors ； orifice restrictor ； actuator, precision pressure regulator

參考文獻

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