飛秒雷射光束指向穩定系統應用於微加工之分析

Analysis of Application in Micro-Machining with Femtosecond Laser Beam Stabilization System

黃士哲(Shih-Che Huang)

指導教授 ： 楊宏智

國立臺灣大學/工學院/機械工程學研究所/碩士(2012年)

https://doi.org/10.6342/NTU.2012.10309

摘要

超快雷射的發展與應用使得雷射加工有了新的發展方向。該項技術透過單光子離子化、多光子離子化的原理，使得能夠加工各種透明與非透明材料，並且具有熱影響區較小與精密度較高的優點。
然而，現實環境中充滿各種影響雷射指向性穩定的因子，舉凡機械震動、空氣擾動、溫濕度變化…等因素，皆可能成為在應用飛秒雷射進行高精密加工時造成精密度誤差的原因。
故本論文的研究目的在於透過觀察加工時的雷射指向性與加工結果之關係，評估在進行雷射加工時指向穩定性對於加工結果之影響。隨後透過使用本論文中所建立的雷射指向穩定系統中的快速轉動鏡組製造可人為控制之擾動，觀察加工結果與擾動性之關係，以期能夠作為出未來相關領域使用雷射指向穩定性進行加工之評估參考。

關鍵字

飛秒雷射加工 ； 高重複頻率奈焦耳飛秒雷射 ； 雷射指向穩定系統 ； 快速反射鏡組 ； 雷射脈衝偵測器 ； 指向性分析 ； 鍍聚合物玻璃

並列摘要

The development of ultra-fast technology has given a brand new approach in laser fabricating applications. With this technology featuring with the principles of single photon absorption and multi-photon absorption, machining any kind of transparent or opaque materials is now available and has superior advantages of small thermal effected zone and high machining precision.
In real world, however, there are kinds of factors that may be able to degrade the laser pointing stability, such as mechanical vibration, air flow disturbance, variation in ambient temperature and humidity, etc. Those factors may degrade the precision in ultra-fast laser fabrication.
The main purpose in this thesis is to observe the correlation of laser pointing stability and laser fabrication result and make an assessment of influence of laser instability in ultra-fast laser fabrication regime. Moreover, with the adjusted laser pointing stabilization system in this work, finding the relationship of laser pointing instability with machining result by making worse laser pointing condition with the fast steering mirror in the system is the second objective in this thesis.
With the relation of laser pointing and laser machining result, it may provide a new reference to those want to build up a laser pointing stabilization system in ultra-fast laser fabricating regime.

並列關鍵字

femtosecond laser machining ； high-repetition rate femtosecond laser ； laser pointing stabilization system ； laser position sensing detector ； pointing analysis ； polymer coated glass

參考文獻

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