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  • 學位論文

應用於細胞三維輪廓重建之相位偵測模式原子力顯微鏡設計與控制

Design and Control of Phase Detection Mode Atomic Force Microscope for Cell Contour Reconstruction in Three-Dimension

指導教授 : 傅立成

摘要


原子力顯微鏡具有奈米級及次奈米之高度辨識率,能對樣本的微結構進行精確的三維成像。本論文提出以相位偵測模式原子力顯微鏡系統應用在細胞三維表面輪廓之重建。在量測系統方面,我們使用光碟機讀取頭來量測探針懸臂撓曲,使量測系統最小化,以降低量測誤差。掃描系統方面使用具備奈米精度之壓電平台作為三維掃描之致動器。 為了能精確得到柔軟細胞的三維輪廓。首先,掃描之水平面上我們設計了一多輸入多輸出型適應性雙積分滑動模式控制器以處理兩軸間耦合、壓電材料之磁滯效應、不確定因素如未考慮之系統參數、外在環境干擾以增進其定位精度並提供準確之細胞大小。其次,在掃描之垂直軸上我們設計了適應性互補順滑模式控制器以增進系統的掃描精確度與強健性及克服傳統正比積分控制器須以人工手動調整的不便。此外,我們使用具備高靈敏度及快速響應之相位回授訊號並搭配以固定交互作用力來掃描之回授機制以降低細胞受損之風險。由於系統具備上述特點,因此能得到較好的三維輪廓圖成像品質。我們將以一系列的實驗驗證系統性能,最後得到精確的細胞的表面輪廓。

並列摘要


Atomic force microscope (AFM) is equipped with height recognition with nano and sub-nano meter scale, and it can accurately build three-dimensional (3D) imaging of samples with micro-structure. In this thesis, we propose a phase detection mode atomic force microscope (PM-AFM) which is mainly applied to reconstruct 3D cell contour. In measuring system, here we use DVD pick-up-head to measure the cantilever deflection. This kind of design can minimize measuring system and hence reduce measuring error. In scanning system, we use piezoelectric stages with nanometer resolution as the planar scanner. For the sake of accurately obtaining the contour of tender cells, first we design an MIMO adaptive double integral sliding mode controller in xy-plane to overcome the system uncertainties, cross coupling, hysteresis effect, and disturbance, which improves the positioning accuracy and provides precision cell size. Second, in z-axis we design an adaptive complementary sliding-mode controller to improve the scanning accuracy and to overcome the inconvenience for user with traditional proportional-integration controller. Besides, we use phase feedback signal, which features with higher sensitivity and faster response. Cooperated with constant force feedback scheme in z-axis, we can obtain a better quality of topographical scan which alleviating risk to damage the samples.

參考文獻


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