高靈敏度三維結構石墨烯氣體感測器之研究

本研究利用化學氣相沉積法(CVD)成長少層石墨烯，轉印在耐熱膠帶上製作三維結構石墨烯氣體感測器以達到高感測靈敏度。此石墨烯氣體感測試片在室溫下可以偵測到二氧化氮ppm等級的氣體濃度。本研究最佳的三維石墨烯感測試片在感測10 ppm濃度的NO2時，其靈敏度可達13.4%，是同樣底面積的限制條件下的二維石墨烯感測試片之1.4倍，此三維試片在感測5 ppm濃度的NO2時，20分鐘後其電阻變化率可達6.3%。此結果也優於近年來的一些奈米碳管氣體感測器與石墨烯氣體感測器之感測靈敏度，而本研究氣體感測器之優點總的而言就是高感測靈敏度、製作簡易，還有低成本花費。

關鍵字

石墨烯；氣體感測器；二氧化氮；三維結構；化學氣相沉積法

並列摘要

We report a highly sensitive NO2 gas sensor 3 dimensional graphene films synthe- sized by a chemical vapor deposition on a polyimide substrate. We demonstrate parts- per-million level detection of NO2 in N2 at room-temperature. The maximum response of our 3D graphene device at 10 ppm NO2 is 13.4% which is about 1.4 times higher than the 2D graphene gas sensor. It also exhibited a resistance change of ~6.3% when it was exposed to 5ppm NO2 gas at room-temperature for 20 min. The results are discussed in light of recent literature on carbon nanotube (CNT) and graphene sensors. The advantages of this sensor are high sensitivity, easy fabrication, and low cost.

並列關鍵字

graphene ； gas sensor ； nitrogen dioxide ； 3 dimensional ； chemical vapor deposition

參考文獻

[30] 鄭碩方，製備銅催化化學氣相沉積石墨烯與其氨氣摻雜之奈米帶電性研究

[1] N. D. Mermin, “Crystalline Order in Two Dimensions,” Phys. Rev. Vol. 176, pp. 250-254 (1968).

I. V. Grigorieva, and A. A. Firsov, “Electric field effect in atomically thin carbon films,” Science, Vol. 306, pp. 666-669 (2004).

[3] A. K. Geim, and K. S. Novoselov, “The rise of graphene,” Nat. Mater. Vol. 6, pp.183-191 (2007).

[5] Sasha Stankovich, Dmitriy A. Dikin, Geoffrey H. B. Dommett, Kevin M. Kohlhaas, Eric J. Zimney, Eric A. Stach, Richard D. Piner, SonBinh T. Nguyen and Rodney S. Ruoff, “Graphene-based composite materials,” Nature, Vol. 442, pp.282-286 (2006).

國際替代計量

高靈敏度三維結構石墨烯氣體感測器之研究

全文下載

主題瀏覽