精密高剛性雙軸氣浮平臺伺服設計

Precision high stiffness servo design of a dual-axes air-bearing motion stage

周上晉(Shang-Chin Chou)

指導教授 ： 顏家鈺

國立臺灣大學/工學院/機械工程學研究所/碩士(2015年)

https://doi.org/10.6342/NTU.2015.10533

摘要

本論文研究改良本實驗室開發的氣浮平台控制方法，使得平台能夠在二維平面上定位，以及降低角度的定位誤差，並且有足夠快的反應速度。
本平台是利用線性馬達以及空氣軸承架設而成，屬於不穩定系統，因此在進行系統識別之前，必須先使得平台能夠穩定，然後才能利用閉迴路系統識別方法，利用測試系統的頻率響應或是從系統的步階響應估測系統模型。為使系統能夠穩定，本研究使用工業上常用的PID控制器以及串聯控制方法，配合從力學上猜測系統可能的模型，達成控制目標且完成系統識別的工作。
本論文的研究成果能使平台在穩態時的最小誤差為30nm、角度誤差為0.05arcsec。10um的位移能夠在0.1秒內達到穩態，使得系統反應夠快具有高剛性的特性。並且平台在不同時間、不同位置下做同方向、等距離的運動，其運動路徑之間的標準差為±20nm，也就是99.7%的路徑相差不超過±60nm，具有高重複性。

關鍵字

雙軸定位氣浮平台 ； 高剛性 ； 線性永磁同步馬達 ； 系統識別 ； Matlab模擬

並列摘要

The research studies a way to improve the control method of air-bearing motion stage. The goal is the stage can position on 2D plan with low angle error and high response.
The stage is driven by four linear motors and air-bearings. The whole system is an unstable system so it needs a controller to make the closed loop stable before identify the system. The system model can be identify by fitting Bode plot or step response. The research use PID controller and cascade control to achieve the control goal and to identify the system with closed loop method.
According to the result, the steady state displacement errors and angle errors are less than 30nm and 0.05arcsec. The controller has high stiffness with the settling time of 10um movement can be reached in only 0.1 seconds. It also has good repeatability with 99.7% error less than ±60nm between two experiments.

並列關鍵字

dual-axes air-bearing motion stage ； high stiffness ； linear PMSM ； system identification ； Matlab simulation

參考文獻

參考文獻(Reference)

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