精密定位平面運動平台之結構設計與分析

Structural Design and Analysis of a Precision Positioning Planar Motion Stage

朱志祥(Chih-Hsiang Chu)

指導教授 ： 鍾添東

國立臺灣大學/工學院/機械工程學研究所/碩士(2010年)

https://doi.org/10.6342/NTU.2010.02056

摘要

本論文提出了對於高精度平面運動平台之結構設計與分析。該平面運動定位平台將具有高精度、長行程與奈米定位精度之特性。這個平台包含了底座、由四組空氣軸承所支撐的移動載台、四組線性馬達和一組二維光學尺。本文中提出使平台性能較佳的配置設計，並且透過有限元素分析方法來分析結構特性。透過最佳化設計方法來完成移動載台的輕量化設計，並且使其最大變形量為2μm。為了避免載台結構共振現象的產生，進行了移動載台在不同情況下的模態分析，並且分析平台在0.5g的加速度規格下，移動載台受到的慣性力而產生的變形量。本文提出在平面運動平台之中空氣軸承對向放置的配置方法，此配置方法可以解決因空氣軸承氣壓源之氣壓變化時，對移動載台所產生的振動現象。本文中並提出利用磁力來校正移動載台偏移的問題與移動載台對正原點的設計概念。本定位平台在X方向與Y方向之行程為50 mm x 50 mm，移動載台的最大加速度經過最佳化的輕量化設計後可達到1g以上的加速度。

關鍵字

平面運動平台 ； 空氣軸承 ； 線性馬達 ； 光學尺 ； 有限元素法

並列摘要

This study proposes the structural design and analysis of a precision positioning planar motion stage. The planar motion stage will have characteristics of high precision, long travel range, and nano-positioning accuracy. The stage consists of a stage base, a carriage supported by four air bearings, four linear motors, and a two-dimensional optical encoder. Configuration design is proposed for better operation characteristics. The structural characteristics of the stage are analyzed through static finite element analysis. A light weight design of the carriage is carried out through optimum design method. Modal analyses of the carriage in different conditions are also considered. The deformation of the carriage due to inertial loading by 0.5g acceleration is analyzed too. An opposed air bearings configuration in the planar motion stage is proposed to solve the vibration problem from air pressure variation. A mechanism by magnetic force to calibrate the tilt problem of the carriage and a homing alignment concept are proposed. The travel range of the stage in X-direction and Y-direction is 50 mm x 50 mm, and the maximum acceleration of the carriage after weight reduction by optimization will reach more than 1g.

並列關鍵字

Planar motion stage ； air bearing ； linear motor ； optical encoder ； finite element analysis

參考文獻

[1] HIWIN Corporation, http://www.hiwin.com/.

[4] Wu, Pei-Tsung, “The Development of a Precision Abbé-free Three-Axis Moving Stage,” Master Thesis, Department of Mechanical Engineering, National Taiwan University, 2007.

[6] Wen-Yuh Jywe, Yeau-Ren Jeng, Chien-Hung Liu, Yun-Feng Teng, Chia-Hung Wu, Hung-Shu Wang, Yi-Jou Chen, “A Novel 5DOF Thin Coplanar Nanometer-Scale Stage,” Precision Engineering, Vol.32, pp.239-250, 2008.

[10] Yoshiyuki Tomita, Yasushi Koyanagawa, and Fumiaki Satoh, “A Surface Motor-Driven Precise Positioning System,” Precision Engineering, Vol.16, pp.184-191, 1994.

[11] M. M. P.A. Vermeulen, P.C. J.N. Rosielle, P. H. J. Schellekens, “Design of a High-Precision 3D-Coordinate Measuring Machine,” Annals of the ClRP, Vol.47, pp.447-450, 1998.