晶圓傳送盒密封洩漏分析

Seal Leakage Analysis for Front-Opening Unified Pod

張學哲(Hsueh-Che Chang)

指導教授 ： 陳達仁

國立臺灣大學/工學院/機械工程學研究所/碩士(2015年)

https://doi.org/10.6342/NTU.2015.10562

摘要

本論文呈現一套分析晶圓傳送盒密封墊圈與栓鎖機構密封特性之系統化流程。當栓鎖機構作動時，帶動盒門向盒體緊靠並擠壓密封墊圈，使盒門與盒體密合，隔絕晶圓傳送盒內外之氣體，使盒內形成一密封空間，且將氮氣充填至盒內並排出微粒與水氣等汙染源。然則在氮氣充填結束後，水氣隨著時間的增加，洩漏至盒內影響晶圓。透過對栓鎖機構之力量分析，取得機構之密封力與下壓位移間之關係；為了解墊圈對於洩漏之影響，以有限元素分析密封墊圈之受力情形與其歷時變化。在分析中，將密封墊圈材料之超彈性質與應力鬆弛現象納入考量，以穆尼-黎弗林模型與馬克斯威爾模型描述材料受力情形，而墊圈材料之參數則藉由壓縮實驗配合基因演算法求得。晶圓盒之密封效能將由孔隙介質墊圈之孔隙密封洩漏方程式評估，檢視栓鎖機構對於密封墊圈之下壓位移與下壓位置對接觸壓力之影響，亦考量墊圈材料之鬆弛現象。透過晶圓盒密封效能實驗建立出該晶圓盒之洩漏速率模型，並根據不同栓鎖機構對密封墊圈之情況進行評估，分析各情況水氣進入晶圓傳送盒之情形，並藉由田口法獲得最佳參數。最後以12吋晶圓盒之結果預測18吋晶圓盒之密封效能。

關鍵字

晶圓傳送盒 ； 栓鎖機構 ； 密封效能 ； 有限元素分析 ； 多孔性介質

並列摘要

This paper presents an analysis of the characteristics of sealing gasket and latching mechanism front-opening unified pod (FOUP). When the latching mechanism actuation, drove the door close to the pod and squeezed sealing gasket in between. The slot between the door and the pod sealed, isolated the external gas, so the pod formed a seal space. After that purged the nitrogen into the pod also discharge steam and other pollution particles. However, after purged nitrogen, by the time increase steam leaked into the FOUP to affect wafer. Through analyzed the latching mechanism, obtained the relationship between the compression force and displacement. To understand the impact of the gasket for leaks used the finite element analysis of the case by the force of the sealing gasket and its changes by time. During the analysis took the super-elastic gasket material properties and stress relaxation phenomenon into account. By Mooney–Rivlin model and Maxwell model described the behavior of the material through the finite element analysis. This paper used a porous medium equation to evaluate the sealing effectiveness of the FOUP. Viewed the latching mechanism influence of the gasket by different compression displacement and compression position, also consider relaxation of the gasket material. Through established the leakage model of the FOUP, analyze each case, which depending on the sealing gasket and the latching mechanism, of stream leak into the circumstances of the FOUP. By Taguchi method found the optimal parameters for 12-inch FOUP. Finally, took the optimal parameters for 12-inch FOUP to predict the 18-inch FOUP seal performance.

並列關鍵字

FOUP ； latching mechanism ； seal leakage ； finite element analysis ； porous medium

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