控制器自動切換於大行程精密定位平台之應用

Automatic Controller Switching for a long-stroke Precision Positioning Stage

彭奕愷(Yi-Kai Peng)

指導教授 ： 王富正

國立臺灣大學/工學院/機械工程學研究所/碩士(2018年)

https://doi.org/10.6342/NTU201800682

摘要

本論文發展一套自動控制器切換機制，應用於大行程精密定位平台，並結合雙光子聚合技術打造微結構物，驗證此機制的成效。隨著科技發展，很多產業對於精密定位技術的需求除了講求精密度，還需要越來越大範圍的定位，如常應用整合平台，結合一個較精密和一個行程較大的平台以同時達成大範圍高精密度的定位。本論文結合精密壓電平台及大行程步進馬達平台，其中壓電平台採用壓電材料作為致動器，壓電材料具有高精度及響應快等優點，但其行程有限，我們選擇步進馬達搭配壓電平台，來增加整體行程，組成大行程且高精密度之整合平台。我們針對壓電平台設計兩個不同特性的強韌控制器，一個具有快速響應但伴隨較大振動的特性，另一則具有較平順但反應較慢的特性，所以我們進一步設計控制器自動切換機制，希望藉此達成快速且平順的響應。另外，我們針對步進馬達平台設計增益調變比例控制器。考慮到兩平台之間的控制和協調，我們設計雙迴圈控制架構，並修正感測器角度偏差，以達到精密定位。最後，我們整合壓電平台及步進馬達平台，並以模擬及實驗驗證其成果。我們進一步結合雙光子聚合技術，打造直徑0.2mm的微透鏡結構物，並檢驗其光學性質，以突顯控制器切換的效果。

關鍵字

壓電材料 ； 步進馬達 ； 精密定位平台 ； 強韌控制 ； 控制器切換 ； 雙光子聚合

並列摘要

This thesis develops an automatic controller switching mechanism for a long-stroke precision positioning stage that consists of a piezoelectric transducer (PZT) stage and a stepper-motor stage. We further integrate the combined stage with a two-photon polymerization (TPP) system and fabricate micro-structures to demonstrate the effect of control switching. As technology develops, there are increasing requirements for precision positioning with a long stroke. Precision stages and long stroke stages are usually integrated to achieve this goal. For example, this thesis combines a PZT stage and a stepper-motor stage. PZT is usually used for precision positioning because of its advantages, such as high resolution and fast response. However, PZT also has limited strokes, so that we integrate a PZT stage with a stepper-motor stage to achieve large travels. On the other hand, the nonlinear properties of PZT can affect precision positioning. Therefore, we design two robust controllers for the PZT stage: one has fast but oscillatory responses, while the other has smooth but slow responses. We design an automatic switching mechanism to switch the controllers to get a fast and smooth response. Furthermore, we apply a proportional control with gain-scheduling to control the stepper motors and design a double loop control block for the combined stage. Finally, we implement the design control for verification by simulation and experiment. In addition, we integrate the combined stage with a TPP system to fabricate microlens with a radius of up to 0.1mm by Fresnel zone plate (FZP). We will check the optical properties of these lenses to demonstrate the effects of the proposed control switching mechanism.

並列關鍵字

piezoelectric transducer ； stepper motor ； precision positioning stage ； robust control ； controller switching ； two-photon polymerization

參考文獻

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