一體式光電式位移感測系統之設計及特性研究

本論文之研究目的在於設計開發適用於小型物件之光電式位移感測系統，除了要考量到系統的緊緻性之外，還要追求高速與精密位移量測的弁鉒S性。為了達到緊緻性與高精密度的要求，整體系統將採取一體成型結構製作方式，使所有元件有穩固與準確安置位置。在設計開發的過程中，首先根據所需之系統弁鉯鴷峔蒬々p光束直徑之雷射光源，雷射光束經由適當光學元件之配置傳送到位移量測區域。被測物之位移造成光強度與明暗區域的變化，透過光電感測元件之量測進而產生電子類比訊號。為了提昇位移量測之準確性與減少隨機雜訊之干擾，本論文採用差動式量測方法，被測物位移所造成光照區域的變化透過分光鏡傳送到兩個光電元件上，並以此二光電元件之相減訊號作為量測系統的輸出訊號。除了系統靜態與動態特性測試之外，還有詳細的量測誤差探討，在動態測試中並與LVDT位移量測系統進行性能比較。

關鍵字

位移感測；雷射光源；光電感測元件；遮斷效應；差動式

並列摘要

The aim of this thesis is to develop an optoelectronic displacement sensor system for small-scale objects. Besides the compactness of the system, the high-speed and precision displacement sensing performances are also the important points of this thesis. To make a high compactness and precision system possible, the system will be made in the form of monolithic type to make sure that all elements are set stably and precisely. In the developing process, choosing the suitable small-diameter laser source according to the system request is the first thing. The laser beam will be transmitted to the displacement sensing area by the appropriate setup of optical elements. The light intensity of the laser beam and the bright/dark area will vary with the displacement of the sensing object, and be sensed by the optoelectronic sensors to output the corresponding electrical analog signal. To improve the precision of the senor system and reduce the interference of the random noise, the differential measurement method is employed. The bright area that varies with the displacement of the sensing object will be projected onto both optoelectronic sensors by using a prism. The differential output signal of the two sensors is considered to be the output signal of the displacement sensor system. Besides the static and dynamic characteristics test of the sensor system, the system error will also be detail conferred. In the system dynamic test, the result will be compared with the data of the LVDT displacement measurement system to check the performance characteristics.

並列關鍵字

laser ； optoelectronic sensor ； masking effect ； displacement sensing ； differential

參考文獻

[1] Anssi, J. M., Juha, T. K., and Risto, A. M., “A High-Resolution Lateral Displacement Sensing Method Using Active Illumination of a Cooperative Target and a Focused Four-Quadrant Position-Sensitive Detector”, IEEE Transactions on Instrumentation and Measurement, Vol. 44, No. 1, February 1995, pp.46-52

[2] Fang, R., Yan, Z., Yee, L. L., Suohai, M., Chinyi, L., and Jun, L., “A Precision Fiber Optic Displacement Sensor based on Reciprocal Interferometry”, Optical Communications, 176 (2000), March 15, 2000, pp.105-112

[3] Marek, D., “Application of a Focused Laser Beam in a Grating Interferometer for High-Resolution Displacement Measurements”, Optical Engineering, Vol. 38, No. 6, June 1999, pp.958-967

[4] Joon, H. B., Ki, H. K., Mun, H. H., Chang, H. G., and Wonho, J., “High-Resolution Confocal Detection of Nanometric Displacement by Use of a 2 × 1 Optical Fiber Coupler”, Optical Letters, Vol. 25, No. 23, December 1, 2000, pp.1696-1698

[5] Masaaki, D., Yutaka, I., Takashi, S., and Okamoto, K., “High-Resolution Displacement Measurement Using Mode Interference in the Optical Waveguide”, IEEE Photonics Technology Letters, Vol. 9, No. 5, May 1997, pp.651-653

國際替代計量

一體式光電式位移感測系統之設計及特性研究

全文下載

主題瀏覽