- 學位論文
飛秒雷射光源穩定系統設計與精密加工之研究
Design of Beam Stabilization System for Femtosecond Laser Micromachining
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摘要
近年來，超快雷射的發明及應用，讓雷射加工領域又往前邁進另一個層級。飛秒雷射除了可加工一般的不透明材料，更可以藉由多光子吸收加工透明之材料，這樣的優點可讓飛秒雷射用於各種材料之加工，絕對是目前最具有研究前瞻性的雷射。飛秒雷射與傳統奈秒級雷射比較，能量吸收時間更為短暫，熱影響區更加微小，加工所產生毛邊也非常少，精密度更較傳統奈秒級的雷射優良許多。 現實環境中許多因素的變化皆會對於雷射造成擾動及影響，例如環境的溫度、溼度、光學桌及空調的振動或空氣壓力的變化造成空氣流動，皆會使得雷射光束在行進過程中不穩定，進而造成材料加工精密度的下降，對於加工及其他應用上便有不良之影響。 本研究之目的是設計及架設出動態修正雷射光束的穩定系統，改善及降低環境中各種因素產生的擾動對於雷射穩定的影響。本研究利用兩台快速反射鏡及兩台感光位置偵測器，架設出修正環境中擾動的雷射穩定系統。接著藉由感光位置偵測器測試整個穩定系統將雷射光束穩定之能力，證明穩定系統確實有修正環境中擾動及穩定雷射光束的效果。 最後將架設的穩定系統應用於飛秒雷射加工矽材料，設定不同能量及脈衝數參數，將加工結果做初步的比較及探討。藉由初步的加工比較，瞭解穩定系統對於飛秒雷射加工的影響性。
並列摘要
Recently the invention of the ultrafast laser makes the field of laser processing to a new legend. Femtosecond laser can machine the opaque material and also can machine the transparent material through the multi-photon absorption. This advantage could make the femtosecond laser process many materials. Femtosecond laser is the most perspective laser on research. Compared with the conventional nanosecond laser, femtosecond laser could result in the smaller heat affected zone, the burr is less and the accuracy is better. There are many factors that influence the laser processing in reality, for example, the temperature variation, vibration of the air conditioner and the air flow in the environment. All these factors would makes the laser beam unstable and affect the machining accuracy down. The research is to design and set an active stabilization system for correcting the unstable laser beam and eliminate the disturbance in the environment. The research uses two fast steering mirrors and two dimensional photodiode detectors to install stabilization system. The research use two detectors to test the ability of stabilization system to demonstrate that the system exactly can correct the disturbance in the environment and can stabilize the laser beam. Finally use the system in the silicon ablation, setting different energy of pulse and different pulses of ablation to discuss the result of the material processing.
參考文獻
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