This thesis presents a physical-aware diagnosis technique for failing dies with multiple defects using novel dictionary. Our diagnosis technique considers fault masking/reinforcement and Byzantine effects simultaneously. We identify sections that involved in a defect as the smallest diagnosis unit. Then, we propose section to physical site mapping technique to find culprit defects. Simulations on ISCAS’89 and ITC’99 benchmark circuits with multiple open-via defects demonstrate the effectiveness of our diagnosis technique. The accuracy is higher than commercial tool when more defects are injected. The accuracy of MD-PhD with 10 open-via defects injected (0.67) is much higher than commercial tool (0.31).