紅外一氧化碳偵測系統

Infrared Carbon Monoxide Detection System

郭哲劭(Che-Shao Guo)

指導教授 ： 李嗣涔

國立臺灣大學/電機資訊學院/光電工程學研究所/碩士(2019年)

https://doi.org/10.6342/NTU201901540

摘要

在此論文中，整合了本實驗室在紅外光元件製程上既有的研究成果，包括針對一氧化碳氣體的窄頻紅外線發射器，以及相對應波長的窄頻偵測器，實現紅外光一氧化碳氣體偵測系統。發射器部分採用 金/二氧化矽/金 波導型紅外線發射器的結構，以發射窄頻針對一氧化碳碳氧三鍵吸收波長之紅外光。偵測器部分採用 金/氫化非晶矽/金 圓孔式的結構，藉由探討氫化非晶矽厚度，與波長紅位移的關係來微調所要的偵測波段以及製作不同的窄頻紅外線偵測器。將實驗室已經發展的柵狀金屬結構的偵測器與本文發展的圓孔金屬結構偵測器進行特性對比。第四章中將以我們製作的元件與對應的量測系統進行不同濃度的一氧化碳的量測。

關鍵字

表面電漿子 ； 一氧化碳偵測 ； 紅外線發光元件 ； 紅外線光偵測器

並列摘要

The thesis investigated the integrated infrared device process, narrow bandwidth infrared thermal emitter and the corresponding plasmonic infrared photodetector developed in our laboratory to realize a Infrared Carbon Monoxide detection system.
The emitter adopt the structure of waveduide mode emitter embedded with golden grating in the dielectric layer and adding the Au / TiO2 / Au island structure on the top to produce the emission of localized surface plasmon resonance. The narrow bandwidth thermal emitter of Au / SiO2 / Au waveguide structure can generated the radiation which can match the absorption wavelength of carbon monoxide C≡O bond. The detector is Au/a-Si:H /Au hexagonal holes structure which can be investigated by observing the wavelength red-shift with the change of dielectric thickness. And the comparison between the Au grating structure detector which has been reported and Au hexagonal holes structure detector.
These devices are applied in non-dispersive infrared (NDIR) system for carbon monoxide detection. In Chapter 4, we will measure the different concentration of carbon monoxide.

並列關鍵字

Surface plasmon ； the Carbon Monoxide detection ； infrared thermal emitter ； infrared photodetector

參考文獻

[1] National Fire Agency, Ministry of the Interior.Website: https://www.nfa.gov.tw/cht/index.php

[2] Hanumanthaiya V. Venkatasetty,Electrochemical sensing of carbon monoxide: United States,US4522690A [P/OL].1985-06-11 [2019-02-25] https://patents.google.com/patent/US4522690A/en

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