可應用於微型光開關之雙平衡位置機構設計與分析

Designs and Analyses of Dual-Position Mechanisms for Micro Optical Switches

梁逸華(Yi-Hua Liang)

指導教授 ： 蔡睿哲

國立臺灣大學/電機資訊學院/光電工程學研究所/碩士(2016年)

https://doi.org/10.6342/NTU201602895

摘要

本研究將開發一微型雙平衡位置機構，未來期望將此技術應用於平面顯示器之光開關，使平面顯示器更加輕薄。此外，雙平衡位置機構可以在不供應能量下，保持其穩定位置，具有省能的效果，相較傳統液晶面板耗電量能大幅降低。本文將探討雙穩態結構樑於不同長短、粗細、厚度的結構設計，以及閂鎖卡榫式結構的實驗結果，並且針對電熱閂鎖卡榫式微機電開關之溫度分佈、位移量、臨界電壓等加以討論，最後是光開關之功率量測。在本研究已成功設計出具有雙穩態特性的雙穩態結構樑及閂鎖卡榫式微機電開關，對比度相較之前的研究提升至約17.3。

關鍵字

微機電系統 ； 雙穩態結構樑 ； 光開關 ； 閂鎖卡榫 ； 電熱驅動

並列摘要

This research will develop a micro optical bistable switching mechanism. In the future, we want to use the technique to apply to displays. Than, this device can make displays thinner and lighter. In addition, the bistable mechanism can maintain its stability position without supplying power. It can more reduce power consumption effectively than traditional liquid crystal display. This article will discuss the structural of bistable beams and latches for different length, thickness, material bistable structural beam. In the experiment, we have designed bistable structure beams successfully and bistable latch optical switches. The power will be only consumed when the stable state being changed. The contrast ratio of optical power of the optical switch has improved to about 17.3.

並列關鍵字

Microelectromechanical systems ； MEMS ； optical switch ； bistable beam structure ； electrothermal actuation ； latching mechanism

參考文獻

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