精密壓電定位系統之伺服設計

Servo Designs of Piezoelectric Precision Positioning Systems

葉雅琴(Yea-Chin Yeh)

指導教授 ： 顏家鈺

國立臺灣大學/工學院/機械工程學研究所/博士(2009年)

https://doi.org/10.6342/NTU.2009.01629

摘要

壓電驅動的微米行程，奈米解析度的系統，在度量衡學與製程設備科技上，皆扮演很重要的角色。本論文提出兩種壓電驅動的光學掃描系統，應用於不同需求的近代光學系統上；一掃描系統主要在提供高解析與高扭力的步進掃描動作，另一掃描系統則可提供大範圍快速反覆的掃描動作。在光學掃描系統中，常需要作連續性的週期運動，本論文首先發展一種切換式不重置反覆學習控制器，用來改善週期性反覆的穩態誤差。切換控制學習的方法可以限制住在實現傳統反覆學習控制器時，常發生的不收斂重置誤差並減輕因變動的起始狀態所造成的不穩定性，以獲得週期性疊代收斂的穩態誤差。針對某些連續的週期性參考目標，切換式不重置反覆學習控制器可以將穩態誤差收斂到感應器的雜訊等級(零穩態誤差)。

此外，本論文也提出一個應用於電子束微影系統的多自由度的奈米定位載台與追蹤變結構控制器來解決其遲滯模型的不確定性。來自遲滯模型的系統不確定性可以被歸類成匹配式與非匹配式的系統不確定性。變結構控制器可以成功地抑制因為不同操作頻率，所產生的遲滯效應並維持其固定的伺服控制精度。PID控制器的伺服控制精度約為75奈米，而變結構控制器的定位伺服控制精度則可達40奈米，相較於使用PID控制器，變結構控制器展現40%的改善量。

關鍵字

壓電奈米定位系統 ； 反覆學習控制器 ； 切換式不重置反覆學習控制器 ； 追蹤變結構控制器

並列摘要

Piezo-actuated micro range and nano resolution systems play important roles in metrology and process equipment technology. Two kinds of piezo-actuated optical scanning systems for modern optics are proposed in this thesis. Two scanning systems differ in its scanning capability, one requires of high resolution step-and-scan motion and the other achieves wide range and fast scan motion. This thesis proposes a modification of the learning controller called “No-reset Switching Iterative Learning Control” to deal with the repetitive error of the optical scanning systems. This method provides a constraint to the non-converging reset error experienced by most conventional iterative learning control algorithms. Its ability to alleviate the influence of the changing initial states was also illustrated. Both the simulation results and the experimental results confirm the performance of the proposed control. For some piecewise continuous references, the steady state errors of the proposed method converge to the sensor noise range (zero steady state error).

Also, a piezo-actuated multi-axis nano-positioning stage for SEM based E-beam lithography system are proposed in this thesis. A tracking variable structure control with hysteresis models is employed to solve hysteresis uncertainty. The system uncertainty from hysteresis model enters the system in the forms of both matched and unmatched uncertainties. The thesis shows that the variable structure control can successfully suppress frequency-dependent hysteresis while maintaining constant servo accuracy. The control accuracy of the VSC is within 40 nm, which is greater than 40% improvement over the 75 nm accuracy maintained by the PID controller.

並列關鍵字

piezoelectric nano-positioning system ； iterative learning control ； no-reset switching iterative learning control ； tracking variable structure control

參考文獻

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