以撓摺機構設計並實現之新型三自由度精密電磁致動平台

Design and Implementation of a New Three-DOF Electromagnetically Actuated Precision Positioning Stage with Flexure Mechanism

黃冠霖(Kuan-Lin Huang)

指導教授 ： 傅立成

共同指導教授 ： 陳美勇(Mei-Yung Chen)

國立臺灣大學/電機資訊學院/電機工程學研究所/碩士(2010年)

https://doi.org/10.6342/NTU.2010.02006

摘要

本論文研究之目的是設計並實現一新型三自由度的定位平臺，此平台具備數十奈米的定位解析度與釐米等級的長行程工作範圍。平台採用一串聯式撓性結構做為導引機構，運動的產生來自撓性臂本身的彈性變形。透過五組電線圈與永久磁鐵的配置組合，水平與鉛直致動器能夠分別針對x、y與z軸向的運動加以控制。此外，為了改善系統的暫態響應與減輕撓性結構天生的共振劣勢，亦提出了以渦電流效應提高系統阻尼的電磁式阻尼器，達到被動與非接觸式的震動抑制。為了實現精確的回授運動控制，在本研究採用雷射干涉儀量測系統做為感測器，以提升平台的定位解析度。
為了要在系統參數變化與外在擾動干擾下達到系統穩定與強健性的目標，本論文提出一個分配式適應性滑動模式控制器，克服在系統參數變化以及外在干擾之不確定因素下，能順利達成系統之控制目標。最後，在經由一連串令人滿意的模擬與實驗結果中，可以證實本論文所設計之定位平臺可以達到長行程、高定位解析度以及快速反應之目標。

關鍵字

精密運動控制 ； 結構減震 ； 串聯式撓性機構 ； 電磁制動器 ； 渦電流阻尼器 ； 分配適應性滑動模式控制

並列摘要

In this thesis, we present the novel design, control and implementation of a three degree-of-freedom (DOF) compact positioner with high resolution in tens of nanometer-scale precision positioning capacity and millimeter-level long travel range. According to the serial flexure mechanism design, whose motion comes from the elastic deformation of the flexure and the force allocation of five pairs of electromagnetic coils and permanent magnets, the precision positioner enables both horizontal and vertical actuations resulting in x-, y-, and z- motions respectively. Next, in order to improve the transient response and to suppress the vibration of the flexure suspension mechanism, an eddy current damper (ECD) is also applied as passive and noncontact resistance of vibration. In order to realize accurate feedback control, a laser interferometer sensing system is implemented to improve the positioning resolution of the stage.
For maintaining stability and robustness of the precision system, we implement a decentralized adaptive sliding mode controller (DASMC) overcoming the overall situations of unmodeled system dynamics and external noises. Finally, from the simulation and experimental results, satisfactory performance has been observed, which means that the designated objectives of this research have been successfully attained, namely, (1) long travel range (2) high positioning resolution and (3) fast response.

並列關鍵字

Precision motion control ； Vibration suppression ； Serial flexure mechanism ； Electromagnetic actuation ； Eddy current damper ； Decentralized Adaptive sliding mode control

參考文獻

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