多軸式壓電奈米定位平台之強韌控制設計與安裝

Robust Controller Design and Integrate in a Multiple-Axis Piezoelectric Nanopositioning Stage

蔡彥臣(Yan-Chen Tsai)

指導教授 ： 王富正

國立臺灣大學/工學院/機械工程學研究所/碩士(2012年)

https://doi.org/10.6342/NTU.2012.02221

摘要

本論文針對三軸式壓電奈米定位平台進行強韌控制器設計，並進一步與大行程定位平台及互補三維平台進行整合，使系統可達到大行程精密定位及六自由度運動控制之應用。
由於半導體製程的迅速發展，對於晶片載台的定位精度要求也越趨嚴謹，因傳統機械架構無法完成高精度定位，吾人採用以壓電材料為驅動裝置之壓電奈米定位平台來完成精密定位。首先經由系統鑑別得到轉移函數，之後利用強韌控制理論，將壓電材料之非線性特性視為系統不確定性，並進行控制器設計，使平台達到高精度定位控制之效果。
然而，壓電奈米定位平台雖然可達到精密定位的效果，卻存在移動範圍過小的缺點，因此吾人將壓電奈米定位平台，與傳統滾珠螺桿及伺服馬達所組成的大行程平台做系統整合，以傳統機械式平台克服移動範圍過小的缺點，並以壓電平台的高精度定位來達到傳統機械機構無法達到的精密定位效果，兩者相輔相成以完成大行程定位控制目標。
最後本論文又更進一步的將壓電奈米定位平台整合於三維空間架構中，使定位範圍從原本的二維平面延伸至三維空間，共六個自由度的定位效果，藉此將奈米定位技術推廣至更多不同的應用之中。

關鍵字

強韌控制 ； 壓電材料 ； 壓電平台 ； 半導體 ； 奈米定位 ； 多自由度

並列摘要

This paper applies robust control to a piezoelectric nano-positioning stage that has three degrees of freedom (DOF). In addition, we combine the nano-stage with a large stroke platform and a complementary three DOF stage, so that the system can achieve precision positioning in large stroke and has full DOF in the three-dimensional space.
As semiconductor technology develops, the requirement of positioning precision is increasingly stringent. Because of the traditional mechanical hardware structure can not reach the requirement of high precision, we choose the positioning stage with piezoelectric actuator to achieve the high precision position control. We first identify the system’s transfer function matrices and then design controllers to accomplish high precision positioning.
In addition, because the moving range of the piezoelectric nano-positioning stage is limited (100um), we integrate the nano-positioning stage with a large-stroke (10cm) moving platform, to achieve long-range, high-precision positioning.
Further-more, we integrate the nano-positioning stage with a complementary three DOF stage that is equipped with four piezoelectric actuators, to construct a six-DOF platform.
The aforementioned mechanisms are designed and implemented for experimental verification. Base on the results, the proposed systems are deemed effective.

並列關鍵字

robust control ； piezoelectric material ； piezoelectric positioning stage ； semiconductor ； nanopositioning ； multiple degree of freedom

參考文獻

[19] 謝錦輝, "強韌控制於雙軸壓電奈米定位平台之應用," 碩士, 工學院機械工程學研究所, 台灣大學, 台北市, 2010.

[1] G. Moore, "Cramming More Components Onto Integrated Circuits," Electronics, 1965.

[2] H.S. Kim. G.S. Choi, and G.H. Choi, "A study on position control of piezoelectric actuators," IEEE International Symposium on Industrial Electronics, pp. 851-855, 1997.

[3] J.H. Oh. G.H. Choi, and G.S. Choi, "Repetitive tracking control of a coarse-fine actuato," Proceedings of the IEEE International Conference on Advanced Intelligent Mechatronics, pp. 19-23, 1999.

[4] Y.A. Lim. G.S. Choi, and G.H. Choi, "Tracking position control of piezoelectric actuators for periodic reference inputs," Mechatronics, pp. 669-684, 2002.