Precise Positioning Control of the Single-Axis Piezoelectric Actuated Stage by using Fuzzy Control Law

以模糊控制法則進行單軸壓電致動平台之精密定位控制

牟善琦(Shann-Chyi Mou) ； 宋祈輝(Chi-Hui Sung)

《清雲學報》 32卷3期 (2012/07) Pp. 13-33

https://doi.org/10.7049/JCYU.201207.0013

摘要

本文主要是針對自行建構的壓電致動平台，以所設計之模糊控制器來進行平台的步幅量測與精密定位控制。以壓電蜂鳴片所建構之新款4-9-9-14壓電致動器為平台之主要驅動元件，配合LabVIEW圖形監控軟體及NI PCI-6115資料擷取卡之使用得以讀取到光學尺之正確位置訊號。在本文中將不使用傳統改變驅動電壓大小來達成平台步幅移動之控制，而將提出一種連續性脈波驅動時間（T（下標 on））來進行參數調控之新控制方法。在定電壓下，平台步幅會隨T（下標 on） 時間之增加而變大、亦會隨T（下標 on） 時間之減低而同步變小。由定位實驗結果可知，導入連續性脈波驅動時間（T（下標 on））之控制概念進入所設計之模糊控制器當中，確實可讓壓電致動平台達到1 μm以下之精密定位。

關鍵字

壓電致動器 ； 壓電致動平台 ； 模糊控制器 ； 步幅 ； 資料擷取卡

並列摘要

In this research, we used the self-designed piezoelectric actuated stage to achieve the nanometer level precise positioning control through the design of the fuzzy controller. A novel piezoelectric actuator structure - 4-9-9-14 piezoelectric actuator is constructed, and it is made of piezoelectric buzzer to drive the stage. The movement of the piezoelectric actuated stage is read and analyzed by means of NI PCI-6115 data acquisition card and LabVIEW software operating in conjunction with a linear encoder. The new consideration of tuning time T(subscript on) is used to place of traditional method of changing the magnitude of driving voltage to control the stepping distance of the stage. Under a constant driving voltage, the stride of the stage increases with time T(subscript on), and the stride of the stage decreases with time T(subscript on). According to the control experiment, the piezoelectric actuator stage would be reached below 1 μm levels by the fuzzy controller which is designed for this experiment, has been demonstrated. Furthermore, the purpose of control could be achieved by changing the time T(subscript on) which has been demonstrated.

並列關鍵字

piezoelectric actuator ； piezoelectric actuated stage ； fuzzy controller ； stepping distance ； data acquisition card