本研究中,主要是針對自行建構的雙軸壓電致動平台,來進行平台的步幅量測與特性分析。本文是利用壓電蜂鳴片所製成之4-9-9-14壓電致動器來作為該平台之驅動元件,並透過4-9-9-14壓電致動器推動精密定位平台,配合使用圖形監控軟體LabVIEW及資料擷取卡NI PCI-6115,以得到光學尺擷取精密定位平台之正確位置訊號。 壓電致動器在進行平台之步幅量測時,其回授裝置為必要之元件,本文將以LabVIEW取代傳統控制電路,編攥其控制器、光學尺之編碼器,並且透過參數調控來達成平台之步幅改變。期待把虛擬儀控之範圍發揮到最大,使我們能夠更方便的控制以及觀察,藉由輸入驅動壓電致動器所需之訊號,進而改變平台移動之步幅大小,並且分析光學尺回授之訊號達成平台之精密定位目標。
Design and fabricate piezoelectric actuators as foundation to position stage system in this research thesis. We plan to adopt t piezoelectric actuators developed by us as actuating elements to drive X-Y table. The mechanical design of piezoelectric actuators as well as X-Y table. will be verified at first in research approach. The 4-9-9-14 piezoelectric actuator developed by our lab can combine the figure monitor software LabVIEW and the data-mining card NI PCI-6115 to obtain the precision position signal of the linear scale. The fuzzy controller is designed to reach the goal of positioning stage because of the non-linear condition of the piezoelectric actuator. The performance of piezoelectric actuators will be measured and the driving parameters will be set well by experimentation. Then the static and dynamic features of the constructed X-Y table will be measured and analyzed; furthermore, the precision of the position stage in this thesis is nanometer level .