新型光學鏡面掃描系統之伺服設計

Servo Design of a Novel Optical Mirror Scanning System

彭勇皓(Yung-Hao Peng)

指導教授 ： 顏家鈺

國立臺灣大學/工學院/機械工程學研究所/碩士(2005年)

https://doi.org/10.6342/NTU.2005.00995

摘要

現代光學掃描系統的性能主要是仰賴掃描平台，不僅是要擴大掃描平台的掃描範圍，還要提高掃描平台的解析度。本篇論文利用電腦輔助設計出一新型光學鏡面掃描平台，經由系統識別、動態模擬和分析，使得掃描平台可以符合高性能的運動要求。這個光學掃描平台使用壓電致動器作為驅動源，並用撓曲構造與鏡面相連接，經由回授控制後，可使掃描的範圍達到正負3.84毫弳度。掃描的控制上，我們利用ILC（Iterative Learning Control）來改善掃描的解析度。由實驗結果可以發現：不同的參考輸入可經由ILC來提高掃描解析度，不同方向的掃描解析度分別可達到10微徑度和6.67微徑度。

關鍵字

光學掃描系統 ； 壓電掃描機構 ； 反覆學習控制

並列摘要

Modern optical systems rely on scanning platform not only to broaden the field of view but also to enhance the viewing resolution. This thesis discusses a computer aided engineering (CAE) approach to a novel high speed optical scanning platform [1]. By aid of the accurate system identification and the dynamic simulation and analysis, the scanning platform achieved by the design is able to comply with some very high performance motion requirements. The optical scanning platform [1] uses piezoelectric transducers (PZT) with flexure joints. The scanning range of the novel optical scanning platform [1] can reach as wide as 3.84 mrads and minus 3.84 mrads after feedback. Different scanning reference demands are scheduled with an ILC controller in an attempt to achieve enhanced resolutions. The scanning resolutions are 10 μrad and 6.67 μrad in each scanning direction when operated respectively under the ILC controller. Experimental results are also provided to show the efficacy of the proposed approach.

並列關鍵字

Optical Scanning System ； Piezo-Scanning Mechanism ； Iterative Learning Control

參考文獻

［1］ Y. Yeh, J. Yen, and C. Lee, “A Novel High-Speed Optical Scanning Platform,” Proceedings of SPIE, Vol.5638 Page352-361, Nov 2004

［2］ V. Fowler and J. Schlafer, “A Survey of Laser Beam Deflection Technique,” Applied Optics, Vol.5, No.10, pp.1675-1682, 1966.

［3］ M. Okuda, N. Wakita, K. Ohya, H. Banno and S.Hattori, “A Laser Scanner Using Stacked Piezoelectric Ceramic Actuator,” Japanese Journal of Applied Physical, Vol.25, Sup.25-1, pp.223-225, 1986.

［4］ T. Ono, “Optical Beam Deflector Using a Piezoelectric Bimorph Actuator,” Sensors and Actuators, A21-A23, pp.726-728, 1990.

［6］ R. A. Buser, N. F. de Rooij, H. Tischhauser, A. Dommann and G. Staufert, “Biaxial Scanning Mirror Activated by Bimorph Structures for Medical Applications,” Sensors and Actuators A, No.31, pp.29-34, 1992.