次波長微結構在表面電漿元件及太陽能電池應用之研究

Study of Subwavelength Microstructures for Surface Plasmon Devices and Solar Cells

黃楷庭(Kai-Ting Huang)

指導教授 ： 陳學禮

國立臺灣大學/工學院/材料科學與工程學研究所/碩士(2006年)

https://doi.org/10.6342/NTU.2006.01240

摘要

在本論文中，我們成功的利用半導體製程製作具表面電漿效應的試片，藉著改變結構尺寸及二維週期性的圖案，研究高折射率材料上特別的光學特性。在結構上，我們改變折射率匹配層二氧化矽的厚度，以及改變鋁金屬膜的厚度，欲找到一最佳的條件，讓表面電漿引發的高穿透強度達到最大，且最有效率。在二維週期性圖案上，我們發現: (1) 橢圓陣列具有偏光效果，隨著橢圓單元的旋轉，欲引發一強的表面電漿效應，入射光之極化方向須恆垂直橢圓的長軸方向; (2) 雙孔陣列，由於圖形排列的關係，可看成兩種模態之表面電漿共振，其一為光柵的共振，出現在長波長波峰，另一為雙孔之隅合共振，出現在短波長波峰; (3) C型陣列具有較傳統孔洞陣列強的穿透強度，其並具有圖形的方向性，使表面電漿在S偏振光入射較容易被引發; (4) 卍字形陣列具有一旋光的特性，可使入射光之極化方向旋轉，若光同時經過兩相同試片，可得到一更大的旋轉角度，高達8.5度。表面電漿異常高的穿透現象可運用在增加太陽能池電或光偵測元件的收光效率，在本論文最後，我們提供了另一簡單、有效率的方式，即利用I-line光源配合OAI技術製作次波長結構之太陽能抗反射層的概念，來增加太陽能池電或光偵測元件的收光效率。

關鍵字

表面電漿 ； 太陽能電池

並列摘要

In this thesis, we have investigated the special optical properties of two-dimensional periodically structures on semiconductor substrates. For study the surface plasmon polaritons and surface reflection phenomena, the sub-wavelength structures with various period and shape were fabricated by conventional semiconductor processes. In this study, we found the optimal parameters to induce strong surface plasmon polaritons phenomena by changing the thickness of the dielectric and metal layers. By varying the shape of two-dimensional periodically structures, we found that (1) the ellipse array containing polarization effects and linear polarization of the incident light always perpendicular to the long axis of the ellipse induced highest transmission. (2) the double-hole array comprised grating mode occurring at long wavelength regime and resonance of double-hole mode occurring at short wavelength regime according to their arrangement. (3) the C-shape induced extra high transmission, and s-polarized light could induce strong surface plasmon polaritons phenomena. (4) the chiral structure possessed optical activity, and linear polarized light was rotated 8.5° by passing through two chiral structure plates.
We proposed to enhance the efficiency of the solar cells and photo detectors by utilizing surface plasmon polaritons phenomena caused high transmission on metal structures. For enhance the external quantum efficiency of solar cells, we also fabricated the sub-wavelength antireflective pyramid structures on silicon substrates by utilizing an I-line stepper with off axis illumination (OAI) technology.

並列關鍵字

surface plasmon ； solar cell

參考文獻

78.趙健皓，次波長金屬微結構之表面電漿特性與應用之研究，國立台灣大學材料工程所碩士論文 (2005)

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