次波長金屬微結構之表面電漿特性與應用之研究

The Study in the Characteristics and Applications of the Surface Plasmon Polaritions with Sub-wavelength Metallic Microstructures

趙健皓(Chien-Hao Chao)

指導教授 ： 陳學禮

國立臺灣大學/工學院/材料科學與工程學研究所/碩士(2005年)

https://doi.org/10.6342/NTU.2005.02222

摘要

近年來表面電漿現象已被廣泛的研究與探討，因為其特殊的光學性質可以用來製作新穎的光學元件。在次波長的範圍下，具有週期性孔洞排列的金屬膜因表面電漿效應，引發出非尋常的穿透率。此現象是由於在介電膜及金屬膜之間的表面電漿效應所引發。本論文利用傳統半導體製程製作二維週期性孔洞陣列結構，研究低折射率材料和高折射率材料上的表面電漿現象。其中發現在高折射率材料的表面電漿共振強度沒有低折射率材料大，但是在高折射率材料上塗佈二氧化矽，可以使表面電漿共振強度提高七倍；而且此金屬-介電-金屬結構會有Fabry-Perot共振出現。我們同時也研究影響表面電漿的參數：(1)金屬孔洞大小、(2)二氧化矽厚度、(3)金屬厚度、(4)孔洞排列方式、(5)金屬性強弱，以期讓表面電漿引發的高穿透強度達到最高。此外，利用圖形的方向性在使表面電漿在s偏振時不會發生，但在p偏振時可以產生表面電漿；金屬孔洞排列的週期改變時會改變表面電漿共振波長的位置，運用以上兩種原理來製作偏光和濾光的元件。

關鍵字

表面電漿 ； 次波長結構 ； 折射率相符

並列摘要

Recently surface plasmon polaritons phenomena were widely studied and discussed, because their unique optical properties can be used for the fabrication of novel optical components. By using the metallic hole-array structures with sub-wavelength scales, transmittance can be dramatically enhanced due to the surface plasmon polaritons effect between dielectric and metal layers. Conventional semiconductor processes were used to fabricate two-dimensional periodic hole-arrays for study the behavior of surface plasmon polaritions on low refractive index and high refractive index materials. In the thesis, we found that the resonance transmittance of the surface plasmon polaritons on high refractive index materials is much smaller than on the low refractive index materials. By coating a SiO2 film on high refractive index materials, it would enhance the transmittance based on surface plamon polartons effects up to seven times. This metal-dielectric-metal (M-D-M) structure also induced the Fabry-Perot resonance. We also studied the parameters that influenced the surface plasmon polaritons effect：(1) the diameters of the metallic holes, (2) the thickness of the SiO2 films, (3) the thickness of the metal films, (4) the arrangement of the hole-arrays, (5) the kind of metal films, to optimize the surface plasmon polaritons effect. By using the characteristics of the surface plasmon polaritons that cannot be induced by the s-polarized light, but it can be induced by the p-polarized light. And the transmission resonance wavelength can be tuned by changing the period of the metallic hole-array. We can fabricate the novel polarizers and color filters by semiconductor processes.

並列關鍵字

surface plasmon ； sub-wavelength structure ； index-matching

參考文獻

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