毫米波頻段環形開槽晶片天線及矽透鏡封裝

Design of On-Chip Ring Slot Antennas with Silicon Lens for Millimeter Wave

陳宏沛(Hong-Pei Chen)

指導教授 ： 盧信嘉

國立臺灣大學/電機資訊學院/電信工程學研究所/碩士(2015年)

https://doi.org/10.6342/NTU.2015.01941

摘要

本篇論文使用40nm及65nm CMOS矽製程分別設計毫米波140GHz與兆赫波550GHz兩種環形開槽晶片天線。以開槽天線作為輻射天線，在設計上金屬密度較容易控制並滿足晶片下線規範且平面結構的設計有利於製作在晶片上。為了抑制矽基板的介質波及提高天線指向性我們在晶片天線下方封裝低損耗的子彈型矽透鏡，而在透鏡尺寸選擇上經由全波模擬軟體模擬天線相關特性，在量測上可以得到很好的驗證。封裝透鏡對於晶片天線的輻射環境可視為等效半空間，所以我們在同樣的天線架構下實作出5GHz低頻天線來驗證環形開槽天線特性以及驗證天線輻射在半空間時的共振頻率偏移與輻射場型。
在晶片天線特性上模擬的140GHz與550GHz工作頻段下的反射係數都小於-10dB。140GHz的訊號源端輸出功率為-2dBm，DC功耗為45mW，模擬封裝透鏡後的天線指向性為18.6dB，輻射效率為40%，等效全向輻射功率(EIRP)為12.62dBm。550GHz的訊號源陣列同源激發時所量測輸出輻射功率為61到126 ，DC功耗分別為0.5到1.34W，模擬封裝透鏡後的天線指向性為33dB，輻射效率為30%，EIRP為20.85及24dBm。
就我們所知，本篇論文首先以微帶線饋入環形開槽天線的形式製作在晶片製程上，晶片天線使用兩種不同晶片製程並與主動電路整合，並架設量測環境驗證天線特性。希望在不同製程的晶片天線製作上能夠掌握天線特性以利未來140GHz雷達影像系統的應用。

關鍵字

毫米波 ； 兆赫波 ； 環形開槽天線 ； 晶片天線 ； 矽透鏡封裝

並列摘要

This thesis uses 40nm and 65nm CMOS technology to design on-chip ring slot antennas which operate at millimeter and terahertz band, respectively. Slot antenna is selected due to easy metal density adjustment to comply with design rule requirement on standard CMOS process and its planar structure can be implemented on-chip directly. To reduce substrate loss, chip is mounted on low loss silicon lens to eliminate substrate wave and improve antenna directivity. Selection of lens size is simulated by full-wave EM simulation and we get good agreement with measurement. The integrated lens for the radiating source is equivalent to half-space. We implement the low frequency model at 5GHz which has the scaled antenna layout as the on-chip version to verify the antenna characterization about half-space radiation environment and resonant frequency shift.
Simulation results for two operation frequency bands of on-chip antennas perform well. The output power of 140GHz source is -2dBm by consuming 45mW DC power. Simulated directivity of integrated lens antenna is 18.6dB, radiation efficiency is 40%. Equivalent isotropic radiated power (EIRP) is estimated to be 12.62dBm. In addition, the source array at 550GHz is measured to radiate 61 to 126 by consuming 0.5 and 1.3 W DC power, respectively. Simulated directivity of integrated lens antenna is 33dB, radiation efficiency is 30%. EIRP is estimated to be 20.85 and 24 dBm.
To the best of our knowledge, this is the first design of on-chip antenna using ring slot antenna feeding by microstrip line and being integrated with active circuits.

並列關鍵字

Millimeter-wave ； terahertz ； ring slot antenna ； on-chip antenna ； integrated silicon lens

參考文獻

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