藉由類花朵狀階層式光捕捉結構來改善非晶/結晶矽異質結構太陽能電池之效能

Photovoltaic Performance Improvement of Amorphous Si/Crystalline Si Heterostructure Solar Cell by Incorporating Flower-Like Hierarchical Light Trapping Structures

蔡昇翰(Sheng-Han Tsai)

指導教授 ： 管傑雄

國立臺灣大學/電機資訊學院/光電工程學研究所/碩士(2015年)

https://doi.org/10.6342/NTU.2015.10983

摘要

此篇論文討論在異質結構太陽能電池表面，利用電子束微影系統(E-beam Lithography)以及反應式離子蝕刻機(Reactive Ion Etch)來製作出二微類十字飛鏢型(Cross-Dart Like)的的週期性微米結構，再利用水熱法(Hydrothermal Method)在表面成長氧化鋅奈米柱，製作出創新的階程式類花朵型(Flower-Like)的表面結構，利用此結構的對稱性搭配氧化鋅抗反射奈米柱，達到全方位漸變折射率的抗反射效果，藉此改善太陽能電池的表面反射率(Reflectance)、外部量子效率(External Quantum Efficiency)、以及短路電流(Short Circuit Current)。實驗量測結果，反射率在400nm至1100nm的波段，由37.41%下降至5.1%，並且外部量子效率在400nm至900nm波段有顯著的提升，此外，短路電流也從34.32mA/cm2提升至39.4mA/cm2。

關鍵字

電子束微影 ； 水熱法 ； 異質結構太陽能電池 ； 抗反射 ； 氧化鋅奈米柱

並列摘要

In this study, we proposed the newly hierarchical flower-like structures (FLS) which combined two-dimensional (2-D) periodic cross-dart like structures (CLS) and one-dimensional (1-D) ZnO nanorods (NRs) on the surface of the amorphous silicon (a-Si)/crystalline silicon (c-Si) heterostructure solar cells (SCs) for light trapping to achieve a great average reflectance reduction from 37.41% to 5.1% in the spectral range from 400 nm to 1100 nm, effectively improve the short circuit current (JSC) from 34.32 mA/cm2 to 39.4 mA/cm2 and a better external quantum efficiency (EQE) performance compared to the references. The new concept has been demonstrated and proven for a-Si/c-Si heterostructure SCs application, and the SCs will accomplish higher efficiency once with an optimized fabrication process.

並列關鍵字

electron beam lithography ； hydrothermal method ； heterostructure solar cell ； anti-reflection ； ZnO nanorods

參考文獻

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