多通道波導干涉儀之設計與研製

Design and Fabrication of a Multi-Channel Waveguide Interferometer

郭志斌(Chib-Bin Kuo)

指導教授 ： 李世光

共同指導教授 ： 吳光鐘

國立臺灣大學/工學院/應用力學研究所/碩士(2006年)

https://doi.org/10.6342/NTU.2006.01513

摘要

波導干涉術(Waveguide Inteferometery)的基本原理是利用全反射的方式將光侷限在一介質中傳遞，當周遭的介質特性發生變化時，會使得光通過波導所產生的相位變化有所差異且TE與TM偏極態所產生的變異量不同，藉由干涉術的方式以及演算法可將兩偏極態的相位變化分別取出。由於此方式能提供兩偏極態對於邊界上變化的檢測資訊，因此可應用於生物分子反應的檢測。
本研究主要目的為建構一套多通道的波導干涉儀系統，其中包含多通道的波導晶片與光學機構設計。波導晶片方面乃利用半導體製程中的電漿輔助氣相沉積法(Plasmon Enhanced Chemical Vapor Deposition, PECVD)製造摻鍺二氧化矽(SiO2-Ge)做為光波導材料，並使用蝕刻的方式做出多個通道於波導晶片上，特色為成本低且架構簡單；在系統光路方面可切換物光與參考光的偏極態，並使用分光鏡與一可調整角度之反射鏡將光分別導入兩不同波導通道中，通過波導後再利用楊氏干涉儀架構將兩道光結合，接著通過四分之一波板與分析板以CCD擷取拍攝干涉條紋，影像由IMAQ影像擷取卡送回個人電腦作以五步相移演算法分析，其中相移的方式是旋轉系統中的分析板來達成。最後可由本系統程式根據物光的相位變化量算出波導邊界上的改變。
實驗中首先採不同濃度之葡萄糖(Glucose)水溶液為檢測樣本，經實驗結果驗證隨濃度增加相位變化亦隨之增加，經分析後可得到此系統具有量測小數點下四位折射率的解析度。此外本系統以ELISA之方式量測C反應蛋白(C-reactive protein, CRP)之專一性鍵結反應，並藉由雙偏極態所量測的訊號可反解出生物樣本薄膜的折射率與厚度值，該檢測結果將可使研究學者對於C反應蛋白之特性有更進一步的瞭解。

關鍵字

波導干涉儀 ； 多通道

並列摘要

Waveguide interferometer is a special kind of evanescent wave sensors, which combines waveguide and interferometer. When a light beam propagates in a waveguide structure, the evanescent field can detect the property of surrounding dielectric media. Since the optical phase of TE and TM polarized light is influenced by both the boundary index and thickness variations to different degree, the evanescent wave can detect the boundary index and thickness variations precisely. Capitalize on this effect, the TE and TM mode polarizations can be used to provide independent information so as to deconvolute the thickness and the refractive index of bio-samples.
In this dissertation, a multi-channel waveguide interferometer system that includes low-cost optical wavrguide and new optical mechanism was built. The newly proposed waveguide chip is fabricated using a plasma enhanced chemical vapor deposition (PECVD) system. Since this process is a standard semiconductor fabrication technique in silicon oxynitride on silicon, the success rate of making this chip is high. The composition of waveguide was SiO2 permeating by Ge. By adding the flux time of Ge, the index would increase. In addition, the channel structure was fabricated by wet eaching process. The optical configuration was developed based on Young’s Interferometry and the the polarization of amplelight and reference light could be exchanged in the system. Besides, a quarter wave plate, an analyzer, a CCD camera, and a personal computer consisted the phase modulation and signal analysis system of this waveguide interferometer.
This newly developed multi-channeled waveguide interferometer system has been proved to have the ability of having 10-4 resolution in measuring reflective indices by measuring different glucose concentrations solutions. Furthermore, the study also verifies the capability of the ELISA experiment inherented within the newly developed system by detecting C-creative protein (CRP). By measuring both the TE and the TM modes, the newly developed system program converts the experimental results into the related bio-reaction information for further researches.

並列關鍵字

waveguide interferometer ； multi-channel

參考文獻

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