矽奈米線場效電晶體生醫感測器與微流道結合之設計

The Integration of Micro-fluidic Channel with CMOS Poly-silicon Bio-sensor for Multiple Biomarkers Diagnosis

廖彥杰(Yan-Jie Liao)

指導教授 ： 林致廷

國立臺灣大學/電機資訊學院/電子工程學研究所/碩士(2016年)

https://doi.org/10.6342/NTU201601191

摘要

近年來由於世界普遍的老齡化社會結構和食品安全問題，急性腎損傷（AKI）疾病人口數日漸增多，尤其台灣急性腎損傷（AKI）疾病人口居為全球之冠。因此，近年來許多研究著重於以生物感測器開發具高信賴度的生物檢測平台來監控AKI的生物標定分子(NGAL)，期待早期發現急性腎損傷綜合徵以及早治療。本篇論文研究中，我們針對0.35 μm 2P4M 商用CMOS晶片製程設計奈米線生物感測器，提出新型後端蝕刻設計以有效地減少晶片之間的誤差值，並良好控制奈米線上方氧化介電層的厚度。實驗中以pH溶液及商業純化高結合率的蛋白質驗證奈米線感測器的功能後，再進行AKI標誌物(NGAL)量測來達成平台建立。
另外，本篇論文也實現在固定的流速條件下，可利用層流流道與感測器的結合來校準雜訊水平; 另一方面研究中也指出，在此層流條件下的流速範圍內，較高的流速比較低流速甚至靜止的條件下，擁有更高的抗體抗原結合效率。綜合以上研究，現今定點式照護(point-of-care testing, POCT)所面臨的挑戰，如方便使用性、元件間差異表現和CMOS相容性，期待可以透過以上創新設計來解決。

關鍵字

CMOS多晶矽奈米線 ； 生物感測器 ； 層流流道 ； 蛋白質結合反應 ； 急性腎損傷

並列摘要

Resulting from aging society structure and the food safety issue in recent year, a large number of people in Taiwan suffer from the disease such as acute kidney injury (AKI). Therefore, it is significant to develop a biosensor aiming to monitor a small number of the biomarker for AKI, called NGAL, and discover the syndrome in the early stage. In the following research, we propose a novel lift-off post end fabrication process for 0.35 μm 2P4M commercially-available CMOS poly-Si NW biosensor to effectively decline the variation between chips and well control its dielectric layer thickness. First of all, we demonstrate the function of nanowire sensors by pH testing. And then, we utilize commercial purified protein with highly binding strength and NGAL, biomarkers for AKI, to prove its sensitivity.
Additionally, the laminar-flow channel for noise calibration is also verified to achieve a reliable bio-molecule detection platform. On the other hand, we also state that higher flow rate has higher binding efficiency than the lower in the range for laminar flow and even stationary condition. As mentioned above, the challenges on point-of-care testing(POCT), such as easy-using, uniform performance and CMOS compatibility, could be solved by these innovative designs.

並列關鍵字

CMOS poly-silicon nanowire ； biosensor ； laminar flow ； binding reaction ； NGAL ； acute kidney injury (AKI)

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