基於嵌入式系統的高精度雙軸平台之驅動器與伺服控制器設計策略

Embedded Control System Design for a Dual Axes Single Stack Precision Stage

鍾承翰(Cheng-Han Chung)

指導教授 ： 顏家鈺

共同指導教授 ： 陳明新(Min-Shin Chen)

國立臺灣大學/工學院/機械工程學研究所/碩士(2013年)

https://doi.org/10.6342/NTU.2013.02530

摘要

精密定位平台在現今的半導體產業以及傳統產業的製程中漸漸獲得廣泛的應用，在硬體以及控制演算法的發展也已步上軌道。然而，傳統的定位平台受限於機構設計，降低了定位精度及暫態響應。因此，本論文採用相對於傳統設計，具有較高推力及反應速度的單層雙軸氣浮平台並設計相應的控制演算法，以期減少反應時間，增加定位精確度以及降低雜訊。以及利用嵌入式系統TMS320F28335單晶片來進行定位控制，控制方式著重於兩軸兩顆平行排列永磁線性馬達之間的耦合，藉以降低控制過程中平台的角度偏移，並改進位移暫態響應。
此外，本論文首先推導平台運動方程式，基於此模型利用滑模控制理論(sliding mode control, SMC)進行位移控制，並分析比較輸入及輸出的各項特性，利用同動控制器進行線性馬達之間的耦合及伺服控制，探討控制過程中同動和位置控制器的交互影響。

關鍵字

單層雙軸精密定位氣浮平台 ； 滑模控制 ； 雷射干涉儀 ； 同動控制器 ； 嵌入式系統

並列摘要

In nowadays manufacturing and semi-conductor field, application of high precise positioning stage gradually become mature, related hardware and algorism have progressed accordingly also. However, accuracy and transient response of conventional precise positioning stage are seriously constraint by mechanism designing limitation, so this research applies an innovative design with two parallel linear motors in dual axes to drive the stage for faster response time and higher thrust force, then obtaining higher accuracy and compressing noise by designing algorism respectively.
Software programming bases on embedded microprocessor Texas Instruments TMS320F28335 for positioning and servo-controlling. By applying synchronous controller to strengthen the relative robustness of dual linear motors in single axis, therefore rotation of stage can be further compressed during controlling process. Finally this research will put emphasis on discussing of sliding mode control properties and effects of input command current, both in single-axis and dual-axes controlling for better understanding the performance in practical system.
Furthermore, derive a mathematical model of stage for adapting in sliding mode control with proportional, integral and derivative sliding surface to improve transient response of positioning. Angle displacement compressing will be achieved by servo control strategies; this property will heavily affect dual-axes control performance. Besides, in this research, interaction between positioning and synchronous control will be noted, which is very important in transient response.

並列關鍵字

Single-layer-two-axis precision positioning stage ； sliding mode control (SMC) ； PID sliding surface ； laser interferometers ； synchronous controlle ； embedded microprocessor

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