- 會議論文
雙軸同動式微機電晶片精密線性馬達定位平台之結構設計與動態分析比較
The Design, Dynamic Analysis, and Comparison of Different Structural Models of MEMS/Wafer Precision Positioning Platforms with Dual Dependent Linear Drive Shafts by the Use of Linear Motors
摘要
近年來線性馬達已逐漸取代傳統伺服馬達旋轉機構；此外，傳統的導軌大多採用接觸式運動，易產生摩擦與間隙問題，利用非接觸式氣體軸承滑軌可有效解決此類問題。故本文主要在於探討以線性馬達為驅動裝置，並搭配氣體軸承導軌的精密定位平台之設計與動態分析；主要是利用電腦輔助設計軟體Pro/E與有限元素分析軟體Pro/M進行兩種不同的平台對位流程作動態時間分析與動態頻率分析，以了解上下晶圓對位時定位平台中心之動態響應並分析平台動態行為與對位精度之關係。精密定位平台的結構幾何特性、物理條件與操作狀況都可能引起系統的非預期性效應，這些非預期性效應會導致材料內應力大幅變動，且是產生動態不穩定的主因。因此，對於系統的動態有全盤的了解，是設計此類系統的必要條件。
並列摘要
In general, servomechanism is to be used as a transmission system for traditional precision positioning platforms; however, there exist some inevitable defects for the system; for example, the relative motion of traditional guide-way is contact motion, which develops friction and has the limit of positioning accuracy. Due to the fact that linear motors have many advantages, the use of linear motors to replace the servomechanisms is the trend of development. In addition, using non-contact air bearing guide-way has the potential to solve the problems as mentioned above. Therefore, this study is dealing with the use of the linear motors and air bearing guide-ways to design MEMS precision positioning platforms. In this study, Pro/E and Pro/M are employed to build and analyze the positioning platform. The deflection of the stage, time history of response, and the resonant frequency in dynamic stage of the platform are investigated. It is known that in certain conditions, undesired effects to the response of the system may occur. Those unwanted effects can cause large amplitude fluctuations in stresses and are the main reason to cause dynamic instability. Hence, a fully understanding of the dynamic phenomena is necessary for designing this system.
延伸閱讀
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