線性永磁同步馬達驅動之單層精密平台驅動器系統設計

Driver System Design of Single-Deck Precision Stage Driven by PMLSM

李明展(Ming-Chan Lee)

指導教授 ： 顏家鈺

國立臺灣大學/工學院/機械工程學研究所/碩士(2011年)

https://doi.org/10.6342/NTU.2011.10842

摘要

本論文的目的在於以數位訊號處理器為基礎，設計出線性永磁同步馬達驅動之單層精密平台驅動器系統。此單層精密平台由移動載台、四組線性永磁同步馬達、四組空氣軸承等部分所組成，搭配電流放大器、位移感測器與其他周邊裝置。此平台運作方式為藉由空氣軸承氣浮移動載台，並以四組線性永磁同步馬達做為直接驅動源，具有非接觸型驅動力、高速、無傳統傳動元件所具有的背隙與直接驅動所擁有的高加速度等優點，以數位訊號處理器搭配空間向量控制為數學理論與演算法基礎，使平台具有數十厘米等級的工作行程，並以平面運動之方式移動。最後，本論文發展出一個以數位訊號處理器為核心之平面運動平台驅動器系統，並呈現其測試結果。

關鍵字

數位訊號處理器 ； 線性永磁同步馬達 ； 單層精密平台 ； 驅動器系統 ； 空間向量控制

並列摘要

The driver system design of single-deck precision stage driven by permanent magnet linear synchronous motors (PMLSM) in this thesis is based on a digital signal processor (DSP). The stage is composed of a carriage, four sets of PMLSM, and four sets of air bearing. Levitated by air bearings, the stage is driven directly by PMLSM which has characteristics of high speed, non-contact drive, no backlash and high acceleration because of directly driving. The related control algorithm of the driver system is based on space vector control and implemented by a DSP. The travel range of the stage is dozens of millimeters and moving among planar motion. Finally, the driver system of planar motion stage based on a DSP is fulfilled and demonstrated in this thesis.

並列關鍵字

digital signal processor ； permanent magnet linear synchronous motor ； single-deck precision stage ； driver system ； space vector control

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