使用三維時域有限差分法及角度譜表示法探討應用於奈米微影之奈米光學結構

我們使用三維時域有限差分法，設計及模擬具有金屬薄膜的奈米光學結構，並探討不同結構的聚焦效果。特殊的光學結構在所設計的聚焦平面上形成小於繞射極限的聚焦點。我們於薄膜上使用不同材料、加入光柵結構、使用最佳化演算法並縮短入射波長以探討其對聚焦效果的影響。使用角度譜表示法，探討並解釋聚焦平面上聚焦點可以突破繞射極限的現象。討論在k-domain中，消散波和傳遞波的影響。說明了消散波對聚焦效果的重要性。

關鍵字

時域有限差分法；菲涅耳波帶片；最佳化；角度譜表示法；奈米微影

並列摘要

The content of this thesis is to design and to simulate the nanophotonic structures by three-dimensional finite-difference time-domain method and the focusing properties of different structures are studied. We study the influence of focusing properties for cases with different materials, silver Fresnel zone plate with grating structures, optimized nanophotonic structures and shorter the incident wavelength. It shows that some specific nanophotonic structures can have the focal spots which are smaller than the diffraction limit in the focal plane. The focal spot which is smaller than the diffraction limit in the focal plane is analyzed and explained by the angular spectrum representation. The propagating waves and the evanescent waves in k-domain are studied. It shows how the evanescent waves are important for focusing properties.

並列關鍵字

finite-difference time-domain method ； Fresnel zone plate ； optimization ； angular spectrum representation ； nanolithography

參考文獻

[20] 鄭逸偉,“應用於奈米微影之電漿子菲涅耳波帶片,” 國立臺灣大學工程科學及海洋工程學系碩士論文(2008).

[1] E. Abbe, “Beitr‥age zur theorie des mikroskops und der mikroskopischen wahrnehmung,” Arch. mikrosk. Anat. Entwichlungsmech., vol. 9, pp. 413–468, 1873.

[2] H. A. Bethe, “Theory of diffraction by small holes,” Phys. Rev., vol. 66, pp. 163–182, 1944.

[3] J. B. Pendry, “Negative refraction makes a perfect lens,” Phys. Rev. Lett., vol. 85, no. 18, pp. 3966–3969, 2000.

[4] D. R. Smith, J. B. Pendry, and M. C. K. Wiltshire, “Metamaterials and negative

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使用三維時域有限差分法及角度譜表示法探討應用於奈米微影之奈米光學結構

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