極化無關鈮酸鋰電光調變器之研製

本論文針對通訊波長1.55um提出一新型鈮酸鋰極化無關電光調變器。其結構與馬赫任德干涉器類似：基本上是由一極化分離器和兩個單極化電光調變器所組成。其中橫電模態波導係利用鋅鎳共同擴散所製成，而橫磁模態波導則僅利用鎵擴散即可製成。雖然採用鋅鎳鎵等三種金屬，但係同一次擴散，可大幅簡化製作過程。在極化分離器製作方面，橫電模態的極化訊熄比為27.5dB，橫磁模態的極化訊熄比為24.3dB。與單極化電光調變器整合後的元件長度為3cm。實驗結果顯示：當操作電壓在100V以內，極化相依損耗均小於0.69dB，但當操作電壓為26V和95V時，則極化相依損耗僅有0.05dB。此驗證了新型極化無關電光調變器之實用性。

關鍵字

鈮酸鋰；極化無關；電光調變器；光波導；積體光學

並列摘要

Novel polarization-independent lithium niobate electro-optic modulators operating at 1.55um are successfully designed and fabricated for demonstration. The proposed device, based on the structure of Mach-Zehnder interferometer, is an integration of a polarization splitter and two single-polarization electro-optic modulators. On the same Z-cut lithium niobate, the TE mode waveguide is fabricated by Zn and Ni co-diffusion, whereas the TM mode waveguide is fabricated only by Ga diffusion. Though three types of metal (Zn, Ni, and Ga) are deposited, only one diffusion step is needed, which greatly simplifies the device fabrication process. For the polarization splitter, the measured extinction ratios are 27.5dB and 24.3dB for the TE and TM modes, respectively. For the single-polarization electro-optic modulator, the device length is 3cm, and the polarization dependent loss is less than 0.69dB when the applied voltage is within the range of 0-100V, and it becomes as low as 0.05dB at two specific applied voltages 26V and 95V. These results show the proposed polarization-independent electro-optic modulator has good potential for practical application.

並列關鍵字

Linbo3 ； Lithium Niobate ； polarization-independent ； electro-optic modulator ； waveguide ； integrated optic

參考文獻

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[30] 陳卓彥，“藍光鋅鎳擴散式馬赫任德電光調變器之研製” ，國立台灣大學光電工程學研究所碩士論文，2005.

[31] 陳松良，“鈮酸鋰藍光方向耦合器之研製”，國立台灣大學光電工程學研究所碩士論文，2005.

[53] 陳祥麟，“鋅鎳及鎵擴散式鈮酸鋰光波導極化分離器之研製”，國立台灣大學光電工程學研究所碩士論文，2009.

[2] R. G. Hunsperger, Integrated Optics: Theory and Technology 5th Ed., Springer, 2002.

國際替代計量

極化無關鈮酸鋰電光調變器之研製

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