藍光鋅鎳擴散式馬赫任德電光調變器之研製

Fabrication of Blue-Laser Zn-Ni Co-diffused Mach-Zehnder Modulator

陳卓彥(Cho-Yan Chen)

指導教授 ： 王維新

國立臺灣大學/電機資訊學院/光電工程學研究所/碩士(2005年)

https://doi.org/10.6342/NTU.2005.02426

摘要

本研究首次利用鋅鎳擴散式鈮酸鋰光波導，以Z切的基板製作操作於藍光波段(473nm)之直波導及馬赫任德電光調變器。由實驗結果發現，鋅鎳擴散式直波導的寬度為1.5um時導單模態；當鎳與鋅的厚度分別為100Å與500Å時，以830°C的溫度擴散60分鐘之波導具有最佳的光場侷限性，且可避免鈦擴散式光波導之鋰離子外擴散問題。操作在藍光波段下的馬赫任德電光調變器，在電極長度0.9公分時，半波電壓為6.5伏特，而訊熄比則約為7dB。

關鍵字

電光調變器 ； 藍光 ； 光折效應 ； 訊熄比 ； 半波電壓 ； 鋅鎳

並列摘要

In this work, Zn-Ni:LiNbO3 single-mode waveguides and Mach-Zehnder modulators operated at blue-laser wavelength are demonstrated for the first time. To support the fundamental mode only, the largest linewidth of the Zn-Ni co-diffused waveguides should be about 1.5um, which is smaller than that of Ti-diffused waveguides, 2.5um. The optical confinement of the waveguides is optimized by diffusing at 830ºC for 60min when the thicknesses of nickel and zinc are 100Å and 500Å, respectively. Moreover, the Zn-Ni:LiNbO3 waveguides are free of lithium out-diffusion as that found in Ti:LiNbO3 waveguides. The Mach-Zehnder modulators operating at blue-laser wavelength are also demonstrated, the half voltage and the extinction ratio of the device are found to be 6.5V and 7dB, respectively.

並列關鍵字

Mcah-Zehnder modulator ； blue light ； photorefractive effect ； extinction ratio ； half voltage ； Zn-Ni

參考文獻

[25] 李牧家, “鈮酸鋰藍光波導元件之研製,” 國立台灣大學光電工程學研究所碩士論文,2004.

[1] N. Flaherty, ”Battle of the blues,” IEE Review, Vol.50, Issue 4, pp.48-50 April, 2004.

[2] D. Fluck and P. Giinter, “Tunable blue light generation by sum-frequency mixing of AlGaAs and InGaAs laser diodes in KNbO3,” Electron. Lett, Vol.32, No.10, pp.901-903, 1996.

[3] S. Shichijyo, K. Yamada, S. Takemura, Y. Oeda, A. Ohkubo, and K. Muro, “Blue and blue-green lasers by intracavity sum-frequency generation with potassium niobate,” Lasers and Electro-Optics, CLEO '96, pp. 465-466, 1996.

[4] M. Rottschalk, J. P. Ruske, K. Hornig, S. Steinberg, G. Hagner, and A. Rasch, ”Single mode channel waveguides and electrooptic modulators in KTiOPO4 for the short visible wavelength region,” J. Lightwave Technol., vol.13, no.10, pp.2041-2048, 1995.