滾輪壓印微奈米複合結構於光學玻璃製程開發研究

Development of Micro/Nano Hybrid Structures on Optical Glass by Roller Hot Embossing

陳柏霖(Po-Lin Chen)

指導教授 ： 楊申語

國立臺灣大學/工學院/機械工程學研究所/碩士(2013年)

https://doi.org/10.6342/NTU.2013.02599

摘要

玻璃材料具有優異的光學性質，且對於物理性與化學性的侵蝕有較佳的抵抗能力，能用於製作出高品質之光學元件。許多奈米結構具有抗反射與高疏水的特性，若能將其用於製作於玻璃材質或玻璃光學微結構表面，不僅能保有玻璃優異的特性，同時能減少其表面反射且具有抗污自潔的效果。
傳統玻璃微結構直接加工製程如電子束微影及雷射加工等，製程昂貴且耗時，而複製成型技術如微熱壓成型又有製程時間長且為批次無法連續生產的缺點。為了克服上述缺點，本研究利用熱滾壓方式達到連續生產、快速量產的目的，降低生產成本。本研究並利用創新性的壓印技術配合陽極氧化鋁製程製作微奈米複合透鏡陣列模具，結合熱滾壓方式進行一次滾壓即成功的製作出微奈米複合透鏡陣列結構於玻璃表面。本研究又進一步使用創新氣體輔助熱壓，配合電鑄技術，製作鎳質微奈米複合模具，解決模具沾黏於基材的問題，並增進熱壓效能。運用以上製程於玻璃上所製作之微奈米複合微透鏡結構具有良好的光學性質，具有良好且均勻的聚光效果，且表面奈米柱陣列結構可於550 nm波長時將反射率由7.60%降低至0.54%。在接觸角方面由67.15∘大幅的增加至120.70∘成為疏水且具抗污自潔效果之表面並達到具低成本、快速且可連續生產之特性。
本研究開發之熱滾壓技術，配合陽極氧化鋁模具，製作奈米柱陣列於強化玻璃表面。經實際量測，本結構可於各波長減少90%左右之反射光；在疏水性方面，接觸角由39.20∘大幅提升至88.75∘。運用此結構，本研究提出並製作雙面微奈米結構奈米柱陣列菲聶爾透鏡複合玻璃，其特點為減低表面反射，抗污漬結與聚光之效果，經實際量測可運用於太陽能模組聚光並增加光強度。

關鍵字

玻璃 ； 熱滾壓 ； 微奈米複合 ； 抗反射 ； 疏水性

並列摘要

Glass is the preferred material for quality optical devices due to its high refractive index and low color aberration. Glass also possesses high mechanical strength and chemical resistance. Surface sub-wavelength nanostructures are known as antireflective and water repellent structures. By fabricating these sub-wavelength nanostructures on surface of micro optical components made of glass, premium optical device with low surface reflection and self-cleaning properties can be realized.
As the demand of fabricating micro/nano structures on glass, the need for low-cost, simple and fast fabrication method has increased. Currently, most micro or nano structures on glass are manufactured by direct-machining such as e-beam lithography and laser machining techniques which are expensive and time-consuming. Mold replicating process such as micro/nano hot embossing has disadvantages of discontinuous process and long cycle time. In this research, for continuous and fast production, hot rolling method is developed.
There are three major parts in this research. In the first part, a novel method was invented by combining embossing and anodic aluminum oxide method to create AAO mold with hybrid micro/nano structures to fabricate quality microlens arrays on optical glass with low surface reflection by hot rolling. Nano pillar arrays on the surface of microlens can reduce surface reflection from 7.60% to 0.54% at 550 nm wavelength. The overall nano/micro hybrid microlens can increase contact angle from 67.15∘ to 120.70∘. In the second part, eletro-formed nickel mold was used to prevent mold sticking and enhance rolling performance. The AAO mold was replicated by gas-assisted hot embossing followed by electroforming to reduce cycle time. In the last part, nano pillars array was hot rolled on Gorilla tempered glass by using anodic aluminum oxide mold to reduce surface reflection of glass and to increase self-cleaning ability. Nano pillars array on Gorilla glass can reduce up to 90% of broadband surface reflection. Meanwhile, the contact angle increased from 39.20∘ to 88.75∘. By combining the glass with Fresnel lens microstructure, this composite optical component can increase up to three time of energy efficiency on solar panels.

並列關鍵字

Glass ； Hot Rolling ； Micro/Nano hybrid ； Antireflection ； Hydrophobicity

參考文獻

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