- 學位論文
滾輪壓印微奈米結構於光學玻璃表面製程開發研究
Development of Micro/Nano-Structures on Optical Glass by Roller Hot Embossing
摘要
具表面微結構玻璃應用日廣，玻璃表面因具有微結構增加其功能例如疏水、抗反射等，目前於玻璃表面製作微結構之技術，如雷射雕刻、表面蝕刻等製程皆屬耗時、複雜且成本昂貴。複製成型可快速製造表面微結構，其中以微熱壓成型最常用，但長時間於加熱與冷卻，以及批量製程，仍無法達到快速量產。本研究提出以滾輪壓印製程複製微結構於玻璃表面，藉由滾輪壓印製程中，加熱與冷卻分開的製程特色，以及可連續熱滾壓達到連續複製的製程特色。 本研究首先組裝滾輪壓印機台，結合高週波與紅外線快速升溫設備，快速滾壓微米與奈米結構於玻璃表面。本研究並提出滾壓玻璃製程中提升微結構轉寫率之方法，並量測微結構之轉寫率印證。奈米結構複製使用自製之陽極氧化鋁(AAO)模板，複製奈米柱狀陣列結構於Soda-lime玻璃表面，並量測抗反射效果，其反射率在光波長300~800 nm下由8~25%下降為0.8~2.5%，證實表面具奈米柱狀結構之玻璃具有抗反射效果。最後並以雙重滾輪熱壓，同時奈米柱狀結構與弧形微米結構壓印於Soda-lime玻璃表面上，成功製作出微奈米複合結構，表面具微奈米複合結構之疏水接觸角量測為114°，相較於原始平面玻璃之接觸角僅有20°，成功製造微奈米複合結構之表面疏水性玻璃。
並列摘要
Glass substrate with micro/nano structures on the surface have many applications and become popular recently. There are many properties such as hydrophobicity and anti-reflection associated with glasses with micro/nano structures on the surface. Traditional fabrication method such as laser machining, wet/dry etching are time consuming and expensive. Replica molding methods can fabricate surface micro/nano stuctures with fast speed. Among them, micro hot embossing is the most commonly used method. However, the long heating/cooling cycle and the batch-mode production prevent it from being used in mass production. In this research, a novel roller imprinting method is proposed to fabricate micro/nano structures on the surface of glass substrates. During the roller imprinting process, heating and cooling were preformed separately and the fabrication of micro/nano structures were carried out continuously. In this research, a roller imprinting facility, with induction and infrared heaters, is designed and implemented to fabricate micro/nano structures on the surface of glass substrates. Methods to increase transcription rate was investigated in this research. Nano pillars are fabricated on the surface of soda-lime glass substrate with the mold of anodic aluminum oxide. The optical performance of anti-reflection are measured. Reflection rate was reduced from 8~25% to 0.8~2.5% in the range of wavelength between 300~800 nm. It proved that glass substrate with nano pillars on the surface have anti-reflective effect. Finally, by intergrated procedure; both micro and nano structures were fabricated on the surface of soda-lime glass and hybrid micro/nano structures were fabricated successfully. The contact angle of the surface with micro/nano structures was 114°, much higher than 20° in bare glass. This study demonstrated the potential of fabricating micro/nano structures using roller hot embossing.