In this thesis, a versatile method to produce superhydrophobic surfaces with micro-silica, nano-silica, and hierarchical structures with micro/nano-silica on glass surfaces were successfully developed. Optically transparent superhydrophobic silica thin films were prepared by using silica particles suspended in several silane couple agents, including Methyltriethoxysilane (METES), Methyltrimethoxysilane(METMS), Dimethoxydimethylsilane (DIMES), Decyltrimethoxysilane (DECYS), and a mixture of METES/METMS, METES/DIMES, and METES/DECYS(molar ratio 1). A silane couple agent, which mimics the hydrophobic compound material on the lotus leaf, is to bond the substrate such as glass and a material such as silica particles. Subsequently, a mixture of silane couple agents achieves higher contact angles and transmittances than a single silane couple agent. Our results also show that as the weight of silica particles increases, the surface roughness is enhanced. After the surface roughness is enhanced, the surface hydrophobicity increased, whereas the transmittance decreased. Therefore, a balance between the weight of silica-particle and the choice of silane is of great importance. These superhydrophobic films have been characterized by scanning electron microscopy (SEM), optical transmission, and contact angle (CA) measurements. A superhydrophobic(CA=162.8°) and nearly transparent(T~84%) surface is obtained on a hierarchical structure dipped in the solution composed of with 0.2g of micro/nano-silica particles and 5.94g METES/DECYS(molar ratio 1).