可撓式基板全噴墨有機電子元件與電路製作

The Fabrication of Organic Electronic Components and Circuits by Inkjet Printing on Flexible Substrate

陳宇璿(Yu-Hsuan Chen)

指導教授 ： 吳光鐘 ； 李世光

國立臺灣大學/工學院/應用力學研究所/碩士(2007年)

https://doi.org/10.6342/NTU.2007.02274

摘要

在本論文的研究之中，首先建構了一套完全自製的噴墨製程系統平台，此平台包括電腦圖形控制程式、墨滴觀測系統、氣壓控制系統等，每一部份都是自行架設，且其整體穩定性並不輸於一些市價昂貴的噴墨系統機台。此外，本論文也利用此噴墨製程系統平台成功的在可撓式基板上，噴印製作出了銀導線、有機電容元件、有機薄膜電晶體元件以及RC濾波器與反向器之電路，達到全噴墨全有機的製程目標。
在各研究的成果方面，本論文利用目前都沒有被發表過的製程方式---銀鏡反應來噴印製作銀金屬導線，其導電率可達106S/m，僅略低於銀塊之107S/m。另外本論文也利用PEDOT有機導電材料與PVP有機絕緣材料製作出453μF/m2的有機電容元件，其為目前所看到關於有機電容元件的文獻中，最高的單位面積電容值，同時本論文也進一步的利用有機電容元件製作出了RC濾波器，其在低頻與高頻時皆分別有濾波的效果。最後，本論文針對有機薄膜電晶體元件的製作作了許多的研究，包括電極通道長度、絕緣層與半導體層厚度等，並利用這些測試出來的參數成功噴印製作了P3HT有機薄膜電晶體元件，這也是目前唯一看到是以全噴墨全有機方式製作出來的電晶體元件，其電流開關比最高可達103，載子遷移率則為4.41×10-2cm2/V∙s。同時，本論文也利用此P3HT有機薄膜電晶體元件嘗試製作了反向器電路，其製程方式同樣為全噴墨全有機，而經測試後，的確可在輸出端獲得反向訊號。

關鍵字

噴墨製程 ； 軟性電子 ； 銀鏡反應 ； 有機薄膜電晶體

並列摘要

An inkjet printing system was developed during the course of this thesis, which includes the inkjet printing stage, the computer programs for graphic pattern control, the inkjet drop observation system, and the pressure control system, etc. The stability of this system was found to be comparable or in certain cases superior to the commercially available system. Moreover, this system was used to fabricate silver leads, polymer capacitors, polymer thin film transistors, RC filters and inverters on flexible substrate, fulfilling the goal of “all-inkjet printing.”
Regarding the research achievements, the silver leads were created by using the “silver mirror reaction,” a process that has not been applied to the inkjet printing process before. The conductivity of the silver leads was found to reach 106S/m, which is only slightly less than that of the bulk silver. In addition, polymer capacitor with 453μF/m2 capacitance, the highest capacitance reported so far, was fabricated using the PEDOT and the PVP materials. Furthermore, RC filter developed by adopting these capacitors was found to filter signals effectively, both for low and high frequency ranges. Finally, various results regarding the development of the organic thin film transistors using the P3HT semiconductor material were detailed, which include the channel length, the thickness of dielectric layer and the semiconductor layer, etc. The organic thin film transistors were also fabricated on the flexible substrates by using newly developed inkjet printing platform. The mobility obtained is as high as 4.41×10-2cm2/V∙s and the on/off ratio reaches 103. It is the first transistor fabricated completely by using the “all-inkjet printing” and “all-polymer” up to date. Experimental data obtained confirms the performance of an inverter made by P3HT OTFT.

並列關鍵字

Inkjet Printing ； Flexible Electronics ； Silver-mirror Reaction ； Organic Thin Film Transistor

參考文獻

[1] Berend-Jan de Gans, Paul C. Duineveld, and Ulrich S. Schubert, “Inkjet Printing of Polymers: State of the Art and Future Developments“, Adv. Mater. 2004, 16, No. 3, February 3.

[2] Bin Chen, Tianhong Cui, Yi Liu, and Kody Varahramyan, “All-polymer RC filter circuits fabricated with inkjet printing technology“, Solid-State Electronics 47, 841–847, 2003.

[3] David Redinger, Steve Molesa, Shong Yin, Rouin Farschi, and Vivek Subramanian, “An Ink-Jet-Deposited Passive Component Process for RFID“, IEEE Transactions On Electron Devices, Vol. 51, No. 12, December 2004.

[6] Fengliang Xue, Zhengchun Liu, Yi Su, and Kody Varahramyan, “Inkjet printed silver source/drain electrodes for low-cost polymer thin film transistors“, Microelectronic Engineering, 83, 298-302, 2006.

[7] Hongming Dong, Wallace W. Carr, and Jeffrey F. Morris, “Visualization of drop-on-demand inkjet Drop formation and deposition“, Review of Scientific Instruments 77, 085101 (2006).