- 學位論文
直角稜鏡之間隙剪影板架構之設計與實驗：SPARROW之改良
Design and Experiment of a Wavefront Analyzer Based on Right-Angle Prism Liquid-Gap Shear Plate: Improvement of SPARROW
摘要
由於微小化的趨勢，微小元件的光學檢測，便扮演著重要的角色。而光學量測有著非接觸性以及高解析度的特色，因此在量測上佔有一席之地。本文以設計出可以同時量測具高度像差之大光束及小光束光波前為理念，進行有關於剪影干涉術的原理以及分析，並設計一機構整合及提升本文作者所屬研究團隊智力開發之剪影干涉儀SPARROW。整體系統之設計理念乃是利用兩個直角稜鏡重疊在一起所造成的空隙形成反射面，並藉由調整間隙的大小以及傾斜角度來達到量測大光束及小光束的效果。由於間隙傾斜角以及系統置放時的誤差角度的存在，使得兩道反射光的光程差以及剪開距離有所變化，使得干涉的結果有所誤差。本論文將針對此一問題進行原理的討論與分析，討論各項參數的影響，並將其修正使其可供光波前檢測用。整合至SPARROW的架構中，成功提升系統的功能。
並列摘要
Minimization is an inevitable tendency due to the progress of fabrication technology nowadays. Optical measurement has been one of the most important in measurements for its non-contact and high-resolution characteristics. This dissertation discussed the theory of lateral shearing interferometry and designed a mechanism that can be used to measure highly aberration wavefront. The design concept of this mechanism is composed of one right-angle prism and one parallel shear plate. When the two components are positioned in close gap, the gap between the two components forms a shear plate structure. By modulating the gap thickness and the incline angle of the gap, the structure has the ability to measure little laser beams as well as large laser beams. When using this structure in wavefront measurement, the optical path difference of the two laser beam will change if the direction of the laser beam is not normal to the right-angle prism and induce some errors in the result. The relations of optical path differences and shear distances between different parameters will been discussed in this dissertation. By using calibration, it can be integrated to interferometer and wavefront measurement.