應用於光波前與物體表面變形檢測之創新剪影干涉儀之設計與建構

Design and Construction of a New Interferometer Using Shear Plate for Optical Wavefront and Object Deformation Metrology

林峻暉(Chun-Hui Lin) ； 李世光(Chih-Kung Lee) ； 吳光鐘(Kuang-Chong Wu)

《光學工程》 81期 (2003/03) Pp. 77-82

https://doi.org/10.30011/OE.200303.0009

摘要

本論文開發與建構出了一套創新之光波前分析系統SPARROW (Shear Phase Analyzer，Reflective/Reflective Optical Wavefront)。此名稱點出了SPARROW有別於傳統光波前分析儀體積龐大之特性。本文所開發之光波前分析儀體積小巧之優點，改善了過去光波前分析儀因體積太大而無法應用於各種光學量測的問題。

關鍵字

干涉儀 ； 剪影干涉儀 ； 光波前檢測 ； 非破壞檢測

並列摘要

In this research, a new interferometer has been developed and named ”SPARROW”, ”Shear Phase analyzer, Reflective/Reflective Optical Wavefront”, which using a single shearing plate to perform shearing task and obtain the optical wavefront and the strain information of a deformed obeject. The new interferometer combines innovative optical measurement configurations. The detailed image processing techniques, five-step phase-shifting methodologies, path-independent phase-unwrapping algorithms, and fully automatic determination of displacement by strain measurements were developed. An experimental setup was executed to verify the performance of this newly developed metrology system. Experimental data obtained were found to agree well with the theoretical predictions.

並列關鍵字

interferometer ； shearing interferometer ； optical wavefront metrology ； non-contact metrology