利用電子束微影蝕刻製造液晶顯示器配向層之研究

Fabrication of Alignment Layer of Liquid Crystal Display by Electron Beam Lithography

佘紹煌(Shao Hwang Sia)

指導教授 ： 趙治宇

國立臺灣大學/理學院/物理研究所/碩士(2005年)

https://doi.org/10.6342/NTU.2005.02476

摘要

在液晶顯示器工業中，傳統上液晶的配向是以摩擦配向的方法完成的。雖然這種傳統的方法十分簡單及方便，但是會有靜電殘留以及灰塵粒子污染的問題，且這種方法的機制尚未完全被人們明瞭。於1972年，Berreman提出配向的原因是因為在經過對表面的摩擦之後會產生極細微的溝槽結構，而液晶沿著溝槽結構做排列將會達到最低能量狀態。在本論文中，我們嘗試基於Berreman的理論模型以電子束微影蝕刻的方式製造極細微溝槽結構做為液晶顯示器配向層，這也可以避免傳統摩擦配向上所產生的問題。我們發現到這種新開發的方法能夠有良好的排列液晶的效果。我們亦嘗試量測以此種配向方式製作出的液晶晶胞的方位角錨定能以進一步定量的評量這種配向方式。我們也嘗試改變溝槽之週期並且觀察方位角錨定能和溝槽週期大小的關係。另外，我們也嘗試量測對不同週期下光電量測曲線以及反應時間的變化來進一步定量分析這種新的配向方式。

關鍵字

電子束微影蝕刻 ； 液晶 ； 顯示器 ； 配向層

並列摘要

In the liquid crystal display (LCD) industry, alignment of liquid crystal is done by conventionally rubbing method. Although this method is very simple and convenient, there will be dust particle and electric static charge left on polymer. Also the mechanism is still unknown. In 1972, Berreman suggested that the alignment of liquid crystal after rubbing treatment to the surface is because of the ultrafine grooving structure formed and alignment along the grooving structure would reach a minimum energy. In the thesis, we try to create a new liquid crystal alignment method based on Berreman’s theoretical model to produce ultrafine grooving structure to be the alignment layer of liquid crystal by electron beam lithography. This would also avoid problems induced during rubbing. It is shown that the newly-developed alignment method has great behavior of liquid crystal alignment. Then we try to measure the azimuthal anchoring energy of a liquid crystal cell made by such method to quantitatively judge the degree of alignment, and observe the relation between the grating pitch and the azimuthal anchoring energy. We also measure the optical properties such as V-T curves and the response time of the LC aligned by different pitches of grooves to characterize the groove alignment method.

並列關鍵字

Alignment Layer ； Liquid Crystal Display ； Electron Beam Lithography

參考文獻

Chapter 1

[2] S. Chandrasekhar, Liquid Crystals, Cambridge (1992).

[3] P. J. Collings and M. Hird, Introduction to Liquid Crystals, Taylor & Francis.

[6] J. L. Janning, Appl. Phys. Lett., 21, 173 (1972).

[7] D. W. Berreman, Phys. Rev. Lett. 28, 1683 (1972).