The objective in this investigation is intended to evaluate the effect of ozonation of low molecular weight precursors on DBP formation. In conventional water treatment process, high molecule weight compounds such as humic substances could be removed significantly by the enhanced coagulation. However, other low molecule weight compounds, i.e., resorcinol, phloroglucinol, and p-hydroxybenzoic acid, couldn’t be removed and exhibit high DBP formation potential (DBPFP). Therefore, the introduction of ozonation / chlorination processes to water treatment plant introduced to investigate the effect of DBP formation. The results of the investigation reveal that destruction of organic precursors by hydroxyl radical exhibits higher DBP formation. In the O3/UV process, the greater amount of hydroxyl radical exposure results in more reduction of DBP. Furthermore, the other harmful by-products such as aldehyde formation also focused on the investigation because of its carcinogenic character. In the comparison of risk assessment between ozonation and coagulation, the ozonation/chlorination processes decrease the carcinogenic risk of finished water. A new model proposed by Chang can fit the chlorine decay and DBP formation data quite well. Adding parameters of pH and alkalinity to the Chang model can predict the chlorine decay and DBP formation data more accurately.