軟性電子元件與噴墨技術之開發與應用

The Development and Application of Inkjet-Printing Based Soft Electronics

許峻豪(Chun-Hao Hsu)

指導教授 ： 吳文中

國立臺灣大學/工學院/工程科學及海洋工程學研究所/碩士(2008年)

https://doi.org/10.6342/NTU.2008.02427

摘要

隨著有機材料與製程設備的發展，軟性電子領域已有成熟的商品發表，基於有機材料的製程溫度、軟性基板的低溫製程需求與低成本考量，溶液製程廣為使用，尤其以噴墨製程搭配roll-to-roll製程方式，被視為最具潛力的製程方式。
本論文中，為了提昇製程環境，自製氮氣手套箱，水氣濃度小於20%，具有自動循環與手動功能，依據實驗需求自行使用切換手套箱運作功能。並且在手套箱內自製一台噴墨系統，結合氣壓控制系統、雙軸馬達平台定位系統、壓電驅動系統、觀測系統已達到高良率與高穩定性製程。
使用噴墨系統製作全噴墨有機薄膜電晶體(Organic thin film transistor, OTFT)，手套箱外製作有機薄膜電晶體的電性效能，電流開關比=2.7×103，電子漂移率=0.31cm2/Vs，Vth=-3.5V;手套箱內製作有機薄膜電晶體的電性效能，電流開關比=3.5×103，電子漂移率=0.39cm2/Vs，Vth=-27V。採用噴墨製程與滴定製程製作有機薄膜壓力感測器，本論文研究壓力與元件撓曲的應變對元件的電阻值變化，針對一系列濃度與厚度的探討，得到最高靈敏度的元件製程參數。

關鍵字

pressure sensor ； OTFT ； P3HT ； carbon black ； PEDOT ； PVP

並列摘要

With the advancement of the organic electronic material and appliance, there are some products in flexible electronics. Consider the process temperature of the organic material, the low temperature processing requirements for the plastic substrate and low cost, the solustion process was used extensively and the inkjet printing process and roll to toll process are best candidate for developmenting the flexible electronics.
In the thesis, in order to improve the environment, the nitrogen glove box with lower than 20％ moisture, autocycle and manual control was fabricated. The function can be chose according the experiment. The inkjet printing system with high performance and stability was integrated with pneumatics controller system, two-axis motor stage with alignment system, piezoelectric driver system and observation system.
The organic thin film transistor was made by the inkjet print system and the thin film pressure sensor was made by the inkjet print system and drop coating. About the performance of the OTFT, Ion/off = 2.7×103, the mobility = 0.31 cm2/Vs and ，Vth=-3.5 V out of the glove box and Ion/off = 3.5×103, the mobility = 0.39 cm2/Vs and ，Vth=-27 V in the glove box. About the thin film pressure sensor, the resistance change with the pressure and the curvature of radius was studied, and the sensivite fabricating parameter was found based series concentration and thickness.

並列關鍵字

pressure sensor ； OTFT ； P3HT ； carbon black ； PEDOT ； PVP

參考文獻

M. G. Kane., et al., Organic thin-film transistor-driven polymer-dispersed liquid crystal displays on flexible polymeric substrates. Applied Physics Letters, Vol. 80, No. 6, 11 February 2002.

Phill Gu Jung., et al., A micropatterned metal embedding process for the formation of metal lines in flexible electronics. J. Micromech. Microeng. 18 (2008) 035017.

S. M. Bidoki., et al., Ink-jet fabrication of electronic components. J. Micromech Microeng. 17 (2007) 967-974.

G. Dennler., et al. A new encapsulation solution for flexible organic solar cells. Thin Solid Films 511 – 512 (2006) 349 – 353

Takao Someya., et al., Conformable, flexible, large-area networks of pressure and thermal sensors with organic transistor active matrixes. PNAS. August 30, 2005. Vol. 102, no. 35.