平面顯示器玻璃基板之氣浮式移載系統分析與控制之研究

Design and Control of an Air Bearing Conveyor System for Glass Substrates of Flat Panel Display

黃峻維(Chun-Wei Huang)

指導教授 ： 江茂雄

國立臺灣大學/工學院/工程科學及海洋工程學研究所/碩士(2010年)

https://doi.org/10.6342/NTU.2010.10682

摘要

本研究旨在發展平面顯示器玻璃基板之氣浮式移載系統，將高壓氣體輸入至氣浮塊內，藉由氣浮塊表面之細小孔隙噴出高壓氣體，在氣浮塊與其上之玻璃基板間形成氣墊層，藉由此氣墊層，可避免玻璃基板因運輸過程中碰撞到輸送平台，不會直接與平台接觸。再以真空吸盤吸附玻璃基板，確保玻璃基板不會因外力干擾產生過大的移動或脫離。最後，控制無桿式氣壓缸進行水平方向之位置控制及速度控制。因此，氣浮運輸平台可以有效的減少因摩擦或震動所造成的毀損或刮痕的機會。
　　本文針對時變氣壓系統的數學模型，進行降階簡化，使氣壓系統為一個三階非線性時變系統，且能滿足匹配條件。在控制方面，以函數近似法為基礎之適應性滑動模式控制結合 控制補償，藉以克服系統之不確定性的時變與非線性問題。本文採用軌跡追蹤的方式來進行玻璃基板的位置及速度控制，以求同時兼顧暫態及穩態的特性。
本文先以Matlab軟體進行系統動態模擬，藉以驗證其控制系統架構之可行性。為實際驗證其可行性，建立平面顯示器玻璃基板之氣浮式移載系統實驗系統，以即時回授控制的方式進行實驗，實現於氣浮式移載系統上。其實驗的項目包含了水平位移軌跡追蹤、水平穩態速度控制及系統綜合分析。

關鍵字

玻璃基板 ； TFT-LCD ； 氣浮塊 ； 氣壓伺服系統 ； 適應性滑動模式控制 ； 函數近似法 ； 控制 ； H-infinity軌跡控制 ； 速度控制

並列摘要

The purpose of this thesis is to develop an air bearing conveyor system for the glass substrates of TFT-LCD or solar industry. Firstly, high pressure is supplied to the air bearings in which the small orifices can form an air cushion between the air bearing and glass substrate. Due to the air cushion, the glass substrate is not directly collided the air bearing plane in conveying process. Then, we use the vacuum sucker to attach the glass substrate for ensuring the substrate can be taken by the sucker. Finally, the rodless pneumatic cylinder is used to implement the path control and the velocity control of the glass substrate. Hence, the system can reduce the damage of the friction or shaking relative to the conventional roller conveyers.
The study focuses on deriving the nonlinear time-varying mathematical models of pneumatic system and then simplifies the models as a 3rd system. In the controller design, the function approximation technique based on adaptive sliding mode controller with tracking performance is used to solve the uncertain time-varying nonlinear system. Beside, using the tracking position for preceding the position and velocity control, we obtain the response of the transient state and the steady state concurrently.
Furthermore, Matlab is used to simulate the real system firstly, and then the test rig of the air bearing conveyor system for glass substrates of flat panel display is developed for ensuring the feasibility of the proposed concept experimentally, including the horizontal path tracking control, constant velocity control.

並列關鍵字

glass substrate ； TFT-LCD ； air bearing ； pneumatic servo system ； adaptive sliding mode controller ； function approximation ； H-infinity control ； path control ； velocity control

參考文獻

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