運用奈米位移原理彩色共焦干涉式線寬量測之研究

Research on Spectrally Resolved Chromatic Confocal Interferometry for Line Width measurement using Nano-shifting principle

江建衡(Chien-Heng Chiang)

指導教授 ： 陳亮嘉

國立臺灣大學/工學院/機械工程學研究所/碩士(2014年)

https://doi.org/10.6342/NTU.2014.11174

摘要

本研究旨在運用彩色共焦干涉量測技術同時具有彩色共焦的光學切片能力以及高空間解析等優點，以不同波長的光源聚焦於不同深度位置的方式進行三維形貌量測，具備大深度範圍即時量測的優勢，以及白光干涉相移技術的奈米等級深度量測解析，可以高深度解析進行細切割的量測特性，發展一套光纖式微型彩色共焦干涉式量測探頭，以光譜掃描式量測技術進行區域量測，並且利用奈米級位移來進行橫向掃描，進而提升橫向解析度，達到光學超解析，以偵測邊緣的位置來決定其橫向解析度。藉以結合上述兩種技術，達到高量測解析精度、大深度量測範圍與快速量測特性的目標。本研究在線寬間距的量測上，經由三十次的重複量測，60μm線寬間距量測結果的寬度為60.86μm，標準差為16.5nm，與掃描電子顯微鏡的量測誤差為6.34%；20μm線寬間距量測結果的寬度為19.79μm，標準差為187.5nm，與掃描電子顯微鏡的量測誤差為1.91%。同時，在整體機構設計部分，以影像光纖結合自行開發的折射式軸向色散與非色散物鏡，使整體架構微型化，將配合微三次元量測系統的體積限制，與其他接觸式探頭發展成多探頭系統。

關鍵字

彩色共焦 ； 白光干涉 ； 奈米位移 ； 線寬量測 ； 微型化

並列摘要

In this research, we use chromatic confocal interferometry measurement methodology. This has the advantages of optical section ability of chromatic confocal, high spatial resolution and nano-scale depth resolution of white light interferometry measurement. We developed a probe of fiber-based miniaturized chromatic confocal interferometry measurement methodology. We improve lateral resolution by spectrally measuring to execute area scanning and using nano-scale shifting to execute lateral scanning. In addition, we detect edge position to determine the lateral resolution. Combining both methods, the probe has high measurement resolution, large depth measurement range and rapid measurement. After 30 times repetitively measuring, the measurement result and deviation of 60μm line width by our system are 60.86μm and 16.5nm. The error compare to SEM is 6.34%. The measurement result and deviation of 20μm line width by our system are 19.79μm and 187.5nm. The error compare to SEM is 1.91%. Meanwhile, the design of mechanism will be integrated with the CMM and turn into a multi-probe system.

並列關鍵字

Chromatic Confocal ； White Light Interferometry ； Nano-shifting ； Line Width Measurement ； Miniaturized

參考文獻

[1] D. Fleischle, W. Lyda, F. Mauch, and W. Osten, "Optical metrology for process control: modeling and simulation of sensors for a comparison of different measurement principles," 2010, No. 77181D

[2] 高偉傑, "白光共焦顯微三維表面輪廓量測系統之研發," 國立台北科技大學自動化科技研究所, 2005.

[3] R. J. kaitis and T. Wilson, "A method for characterizing longitudinal chromatic aberration of microscope objectives using a confocal optical system," Journal of Microscopy, Vol. 195, pp. 17-22, 1999.

[4] A. K. Ruprecht, C. Pruss, H. J. Tiziani, W. Osten, P. Lucke, A. Last, J. Mohr and P. Lehmann, "Confocal micro-optical distance sensor: principle and design," Proceedings of the SPIE, Vol. 5856, pp. 128-135, 2005.

[5] P. Lucke, A. Last, J. Mohr, A. K. Ruprecht, C. Pruss, H. J. Tiziani, W. Osten, P. Lehmann and S. Schonfelder, "Confocal micro-optical distance sensor: realization and results," Proceedings of the SPIE, Vol. 5856,pp. 136-142, 2005.