金屬光子盒之製作及光電特性分析

Fabrication and Electro-optical Characteristic Analysis of Metallic Photonic Box Structure

劉斡中(Wo-Chung Liu)

指導教授 ： 林清富

國立臺灣大學/電機資訊學院/光電工程學研究所/碩士(2005年)

https://doi.org/10.6342/NTU.2005.10434

摘要

人造光源在人類的文明發展中扮演著舉足輕重的角色，從遠古時候的鑽木取火至愛迪生發明燈泡，人類追求完美光源的腳步始終沒有停歇。近年來，隨著半導體製程技術的進步，製作奈米尺寸的結構成為可能，發光二極體的出現掀起了另一波的光源革命。在本論文中，我們提出一種新的發光技術構想，稱之為 「金屬光子盒」 結構。以試圖取代現存的照明技術，達到無汗染、 高效率的發光。

我們在矽晶片上設計並製作由金屬包覆介質之光子晶體結構，其大小在 1μm，藉由曝光、 顯影、 蝕刻、 蒸鍍等標準半導體製程製作元件，並且在掃描式電子顯微鏡下觀察到成功製作的元件結構。接著我們製作並量測尺寸僅僅只有 300nm 的金屬光子盒。另外也展示了以深紫外光光罩對準機在光阻上定義奈米級圖案的可能性。

最後，我們發現了一種奈米的能量轉移結構，這是在過去的文獻中所沒有被提到過的新穎機制。它具有將入射的 532nm 雷射光波長之部份能量轉移至 300nm，並且其轉換能量為線性增加，頻寬也隨著入射的能量超過 30mW 後出現縮減的現象。

我們希望，藉由這樣的金屬光子盒結構之研究，能夠使人造光源的演進向前邁出一大步，以因應將來各種照明及光學應用上的需要。

關鍵字

光子晶體 ； 空腔共振器 ； 黑體輻射 ； 人造光源

並列摘要

The evolution of artificial light sources has played an important role in technology development. In ancient times, people had tried to use torch to obtain light in dark. Thomas Alva Edison invented the first lamp in 1878. Since then the mankind has never ceased the intension to invent better artificial illumination sources. With the advancement of VLSI technology, it is no longer impossible to fabricate nano-scale patterns. This leads to the flourish of light emitting diode technology and starts another ``illumination revolution'. In this dissertation, we propose a new illumination structure, named “metallic photonic box”. Such structure is aimed at replacing the current illumination technology to achieve no pollution and high efficiency lighting.

We design and fabricate photonic crystal structures with dielectric cube wrapped by metal on silicon wafer. The dimension of the dielectric cube is designed to be 1μm. The structure is successfully made by using standard VLSI process such as exposure, development, dry etch, and evaporation. The cross-section view of the sample is verified by scanning electron microscope. Furthermore, another metallic photonic box structure with dimension around 300nm is also made and measured.
We also show the ability of making nano-scale patterns on photoresist through the help of deep UV mask aligner.

Finally, an energy transfer structure is proposed. The energy transfer mechanism is not observed before. It is capable of transferring part of the energy of incident 532nm laser to 300nm. The converted signal is proportional to the incident laser energy. In addition, the spectral width is further reduced after the input pumping intensity exceeds 30mW.

It is expected that, with the research of such metallic photonic box structure, the artificial illumination will usher in a new era. We hope that future illumination and optical application demands can be fulfilled by this new concept.

並列關鍵字

photonic crystal ； cavity resonator ； black-body radiation ； artificial illuminance

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