應用於生醫訊號偵測之CMOS感測單晶片研製

CMOS Based Sensor System-on-Chip for Biomedical Use

陳又豪(Yu-Hao Chen)

指導教授 ： 呂學士

國立臺灣大學/電機資訊學院/電子工程學研究所/碩士(2014年)

https://doi.org/10.6342/NTU.2014.11196

摘要

CMOS 感測系統單晶片提供重點照護低成本、即時偵測並即刻對訊號做處理與可攜帶性之可能性。在本研究中利用台積電0.35μm 標準製程技術，整合化學、生物與電的原理共研製三種感測系統單晶片。
第一種為利用參考式電晶體(ReFET)實現一酸鹼感測電路，其感測靈敏度可達34.242 mV/pH，可用於感測人體內pH變化。
第二種是多晶矽奈米線生物分子感測系統單晶片，利用標準半導體製程後，透過後段製程蝕刻處理，可將多晶矽奈米線裸露作為感測之用。根據實驗結果，此感測系統晶片對急性腎損傷的生物標記分子NGAL 之靈敏度可達3pg/ml。
第三種則是對果蠅心電量測的感測晶片，此晶片於標準半導體製程後透過液態金屬銦鎵共金(Indium Gallium, InGa)塗布，可做為導電介質於單晶片及果蠅體表上，根據實驗結果，此種方式可以實現非侵入式果蠅心電量測。
此三種感測系統單晶片在未來有極高的潛力可做為重點照護之用。它們的效能可媲美甚至是超越現有商業產品或是技術。
本文中所提出之電路均使用台積電0.35μm 標準製程技術實現。

關鍵字

系統單晶片 ； 生醫 ； 後製程 ； 蛋白質檢測 ； 讀出電路 ； 免標定 ； CMOS-MEMS ； 果蠅 ； 心電 ； 液態金屬 ； ReFET ； 酸鹼感測

並列摘要

CMOS based sensor system-on-chip (SoC) have a great potential to realize the vision of future point-of-care testing (POCT) service with low-cost, real-time detection following with data processing and portability. We present here three types SoCs which combine chemical, biological, and electrical mechanisms using Taiwan Semiconductor Manufacturing Company’s (TSMC) 0.35 μm standard CMOS fabrication process.
First, a ReFET are realized by TSMC 0.35 μm standard CMOS fabrication process, which can reduce the drifting effect of pH sensor and the sensitivity of the ReFET is about 34.242 mV/pH.
Second, a poly-Si nanowire based bio-SoC was realized in commercial process followed by post-process steps. Measured results show NGAL (a biomarker protein of Acute Kidney Injury) limit is about 3 pg/ml.
Third, liquid metal (Indium Gallium, InGa) are used to noiselessly conduct noninvasive ECG recordings of Drosophila.
These three kinds biosensors have the high potential to be used in POCT applications in the future. The sensing performances are better than or compatible to the current methods and commercial products.
All the works are fabricated in TSMC 0.35 μm 2P4M process.

並列關鍵字

SoC ； biomedical ； post-IC ； protein detection ； nanowire ； readout ； label-free ； CMOS-MEMS ； Drosophila ； ECG ； liquid metal ； ReFET ； pH sensor

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