微影自合成聚苯胺導電薄膜之製備研究

Study on the Preparation of Conductive Polyaniline Films by Lithography and Self-assembly Process

李其欣(Chi-Hsin Li)

指導教授 ： 謝國煌

共同指導教授 ： 陳兆勛(Chao-Hsun Chen)

國立臺灣大學/工學院/高分子科學與工程學研究所/碩士(2004年)

https://doi.org/10.6342/NTU.2004.02218

摘要

本研究主要合成含羧酸基之紫外光可硬化樹脂及導電高分子聚苯胺，利用特殊官能基間的自組裝性質以及微影技術，製備全高分子組成之透明導電線路薄膜，並開發最佳化製程程序。
以丙烯酸為單體，與PPG700、PPG400寡聚物合成之Urethane Acrylate混摻，成它X成具有活性官能基-COOH之紫外光可硬化樹脂。以紫外光透過光罩曝光進行交聯反應，顯影後獲得5~100μm線寬之圖案。藉由官能基間特殊引力作用反應，將苯胺單體自組裝至活性官能基表面後，再以原位聚合反應聚合得聚苯胺。
利用FT-IR鑑定樹脂組成、GPC分析樹脂分子量，以OM及AFM觀察Pattern外觀型態，使用UV-Vis吸收光譜與ESCA鑑定聚苯胺自組裝結果，熱性質方面使用TGA與DSC分析，最後以四點探針法量測導電性，UV-Vis穿透光譜測量透明度。
本實驗結果可獲得導電度10 S/cm、透明度約70%之透明導電薄膜，之後在熱性質及微影圖案的細緻型態表現上再做改進，將可達到實際的產業應用性。

關鍵字

丙烯酸 ； 微影 ； 紫外光可硬化樹脂 ； 原位聚合反應 ； 聚苯胺 ； 自組裝

並列摘要

In this study, we synthesized UV-curable acrylates with carboxylic acid groups as substrate for self-assembly processing in producing conductive polyaniline. The conductive pattern by self assembly techniques was developed. Develop the optimum produce process.
Acrylic acid was used as monomer to blend with urethane acrylates in order to synthesize the UV-curable acrylates with carboxylic acid. The pattern with 5~100μm line-width was prepared by lithography technique. The aniline monomer was self-assembled to the carboxylic acid groups on the pattern by the molecular attraction to form complex. The “in-situ polymerization” to polymerize PANi was conducted further in the aqueous solution.
We used FT-IR to identify the structure of resins. And used GPC to analyze their molecular weight. The morphology of patterns were observed by OM and AFM. UV-Vis spectroscopy & ESCA were employed to identify the self-assembly results of PANi. In thermal properties, TGA and DSC were used to analyze our samples. Finally, we use the four-probes method to measure the sheet resistivity and use the UV-Vis spectroscopy to analyze their transparency.
The transparent conducting membrane with conductivity about 10 S/cm and mean transparency over 70% was obtained. The performance of the transparent conductive membrane can be improved further for the commercial applications.

並列關鍵字

UV-Curable Resin ； In-situ polymerization ； self-assemble ； Polyaniline ； Lithography ； AA

參考文獻

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