發展3D銀電極於介電泳力微裝置

Development of 3D silver electrodes for dielectrophoretic device

魏廷祐(Ting-You Wei)

指導教授 ： 沈弘俊

國立臺灣大學/工學院/應用力學研究所/碩士(2011年)

https://doi.org/10.6342/NTU.2011.03327

摘要

本研究利用銀鏡反應經由層流轉換圖案技術在微流道內製作3D電極，並將此晶片應用在微奈米粒子分離的生醫晶片上，整個製程僅需一道光罩即可製作完成，別於以往繁雜步驟並可快速沉積出電極。本粒子分離晶片是利用介電泳原理，將粒子因分離後達到純化的效果。
此實驗使用自行調配的銀鏡反應溶液並注入已設計好之微流道內，控制流體的體積流率使達到一最佳的沉積條件，並成功形成兩條平行3D立體電極。本研究之分離物使用多壁奈米碳管，因奈米碳管本身具有導體與半導體性質，吾人將透過此立體電極來和平面電極做分離後之純化度比較，其利用拉曼光譜量測、 值比較與電流量測做純化度驗證。從實驗結果可發現，經3D電極作用後的導體奈米碳管其 值降到0.71比使用平面電極來的低，且經3D電極作用後的導體奈米碳管電流值也有明顯提高，證實3D電極比平面電極更能有效純化奈米碳管。
本研究成功發展出快速製作立體電極的。由於3D電極有高厚度，因此可降低操作電壓與減少焦耳熱等優點，而此開發建立在生物晶片上且能有效達到純化效果，對於未來應用在生物粒子分離有很大的幫助。

關鍵字

銀鏡反應 ； 3D電極 ； 介電泳力 ； 奈米碳管 ； 捕捉細胞

並列摘要

A high throughput micro-nano-particle separation device with 3D-electrodes was fabricated in this study.The 3D electrodes were fabricated to provide dielectrophoresis (DEP) force by using the combination of silver mirror reaction and microfluidic laminar flow patterning technique.Only one photomask was required during the fabrication process without additional vacuum-based metal deposition processs. Silver mirror reaction solutions were prepared and injected separately into a microchannel. The optimal deposition condition was tested and two parallel 3D electrodes were successfully formed at the liquid –liquid interfaces. Multi-walled carbon nanotubes (MWCNTs)were purified by DEP force according to the electrical characteristics. Raman spectroscopy, ratio, and current-voltage measurements were utilized to compare the purification performance between 3-D electrodes and plannar electrodes. From the experimental results, when we used 3D electrodes to pure MWCNTs, the ratio of conducting MWCNTs could be reduced to 0.71. It was lower than ratio of using planar electrodes. Moreover, current of conducting MWCNTs was increased by 3D electrodes. It shows that 3D electrodes could provide higher purification.
In this study, we have developed a simple and rapid method to deposit 3D electrodes. The advantages of 3D electrodes are the reduction of applied voltage and Joule heating due to high thickness. This work has been able to attain higher purification for such a lap-on-a-chip application.

並列關鍵字

silver mirror reaction ； 3D electrodes ； dielectrophoresis ； carbon nanotubes ； cell traps

參考文獻

林建宏, “微粒子操控技術之開發及特性研究”, 國立台灣大學應用

劉振邦,“粒子操控之微混合器晶片開發”, 國立台灣大學應用力學

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