蠕動式微幫浦之製作與特性量測

Fabrication and Characterization for Thermo-pneumatic Peristaltic Micropumps

廖偉吉(Wei-Chi Liao)

指導教授 ： 楊燿州

國立臺灣大學/工學院/機械工程學研究所/碩士(2007年)

https://doi.org/10.6342/NTU.2007.03344

摘要

在本研究中，我們製作數種不同規格之熱氣動式微蠕動幫浦，並針對其特性作量測及探討。幫浦的驅動理論亦做了推導，並得到施加之驅動電壓與驅動薄膜變形量之關係。我們利用軟微影技術，製作出微結構之元件母模，以PDMS翻模之方式製作出微幫浦所需元件。本研究設計出由3組、5組、7組之不同蠕動結構數目所串接而成之微幫浦，探討由不同數目之蠕動結構對微幫浦性能之影響，並比較微幫浦於不同驅動頻率與不同背壓下之流量變化。實驗結果顯示，不同數目蠕動結構串接而成之微幫浦，其最大流量均出現於驅動頻率為2Hz時，三種不同蠕動結構數目微幫浦之流量分別為1.16、1.15、1.25

關鍵字

熱驅動 ； 蠕動式 ； 微幫浦

並列摘要

In this paper, the fabrication and characterization of thermopneumatic peristaltic micropumps are presented. The working principle of the micropumps is derived, and the relationship of the driving voltage and the deflection of the PDMS membrane is obtained. By using soft lithography technique, the SU-8 molds of the component of the micropumps are fabricated. Then, PDMS replicate are fabricated using the SU-8 molds. Micropumps with three different configurations are fabricated. These three configurations are composed of 3, 5 and 7 serial peristaltic structures, respectively. In order to study the effects of number of the peristaltic structures on the performances of the micropumps, we measure the flow rates and the maximum back pressures for the micropumps operating at different driving frequency. The experiment results show that the maximum flow rate of these three types of micropumps occurs at the driving frequency of 2 Hz. The maximum flow rates for the micropumps with 3, 5 and 7 serial peristaltic structures are 1.16, 1.15 and 1.25

並列關鍵字

Thermo-pneumatic ； Peristaltic ； Micropumps

參考文獻

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