- 學位論文
噴墨式有機濕度感測元件之開發
The Development of Inkjet-Printing Humidity Sensing Device
摘要
天氣的陰晴和濕度變化與人類的生活習習相關，自古，人們就開始利用簡便的器具測得空氣中濕度改變，從懸掛羽毛與木炭的重量比較至琴弦音律差異得知濕度增減，再至乾濕球與毛髮濕度計的現世。直至九十年代後，科技的進步及空調設備普及，電子式濕度計發展更是有了長足的進步，使得濕度感測器由簡單元件漸向智能化、多功能化發展。 高分子材料具有製程簡單、成本低、低溫操作等特性，實為未來電子領域發展之趨勢。本論文利用半導體製程與自製噴墨系統，使用有機高分子聚3,4二氧乙烯噻吩-聚苯乙烯磺酸(PEDOT:PSS)作為感濕材料，透過摻雜二氧化矽(SiO2)及氧化鋅鋁(AZO)的奈米粒子，以期提升對濕度感測的穩定性及靈敏度。 本論文成功地噴印出三種感測元件，其電阻與相對濕度呈高指數相關，可作為正特性電阻式濕度感測器，且噴印之濕度感測元件皆具有高靈敏度、可重複性、高專一性及反應時間快的特性。並於論文中証實摻雜二氧化矽奈米粒子於PEDOT:PSS後，對濕度反應可提升106%；摻雜氧化鋅鋁奈米粒子可以提升PEDOT:PSS對水汽的反應達67%。此外，利用噴墨製程於晶片噴印各種感測陣列，透過各感測元件間的聯立方程解，便可使晶片作用於不同環境，而不限於偵測單一氣體，此方法可拓展感測元件的應用領域，提升其產業價值。
並列摘要
Since the ancient times, the rain and humidity of the weather has been a great concern in daily life. Simple tools were used to detect the humidity in the air. People in the old times used hanging feather, the weight change of the charcoals, and the tune change of the instruments to observe the humidity change in times. In recent times, conventional bulb hygrometers and hair hygrometers are invented to measure the humidity. Until the late 90’s, the technical boost has given the development of electrical hygrometers a chance to become intelligent and multifunctional. Polymers are attractive materials in electronic field for their easy fabrication processes, low cost, room temperature operation, etc. Herein, with the combination of semiconductor process and ink-jet printing system, we have developed the innovative humidity sensing materials based on the nanoparticles of silicon dioxide and Al-doped zinc oxide as dopants to improve the doped poly(3,4-ethylenedioxythiophene)-poly(4-styrenesulfonate) sensitivity and stability to the humidity. In this work, we presented three humidity sensing devices by inkjet printing, the relationship between their resistance and relative humidity is highly exponential dependent. All devices have been proved to be highly sensitive and repeatable. We have also proved that after the doping of nano-SiO2 particles into PEDOT:PSS, the sensitivity can be improved to 106%; after doping the Al-doped zinc oxide, the sensitivity to water vapor can be risen up to 67%. Further, by taking the advantages of inkjet printing system, different sensing materials can be printed on one chip. While each of the sensing devices possesses its own solving equations, the gas sensor chip has the potential to be applied to various aspects by solving the equations of each sensing device simultaneously. Consequently, the extension of application of the sensing devices can be expanded, increasing the industrial values at the same time.