曲面型微透鏡陣列之研製

Fabrication of micro lens array on a curved surface

詹有岳(YU-YUEH CHAN)

指導教授 ： 趙崇禮

淡江大學/工學院/機械與機電工程學系碩士班/碩士(2019年)

https://doi.org/10.6846/TKU.2019.00576

摘要

由於光電子，半導體的快速發展，對高精度和定制形狀的元件的需求很大。光學元件已經從平面，球形，非球面到自由形狀的幾何形狀發展而來。隨著對具有復雜形狀和小特徵尺寸的精密光學元件的需求穩步增長，在開發新技術和改進現有方法以有效和經濟地生產這些部件方面已經進行了許多努力。除了小而輕，微透鏡陣列（MLA）和曲面微透鏡陣列（CMLA）可以提供普通單鏡頭系統所缺乏的一些額外的3D信息。因此，MLA在光場相機，晶圓級光學器件和微型投影儀等系統中發揮著重要作用。與單鏡頭系統相比，CMLA可用作複眼，並提供具有全景視野（FOV）的多功能形態。然而，CMLA的自由形狀使它們很難加工和形成。當那些CMLA由玻璃製成時，事情變得更加艱難。玻璃成型工藝（GMP）是近年來能夠批量生產精密玻璃光學元件的這些方法之一。 GMP的主要障礙之一是精密模具製造。由於模具通常由硬質和脆性材料如碳化鎢（WC）製成，因此特別是在CMLA的情況下，將這些模具精密加工成超精密加工表面並且亞微米級形狀精度極其困難。本研究旨在研究聚合物對玻璃CMLA的製備工藝。鎳在不銹鋼模具上進行化學電鍍，隨後在本研究中採用慢速工具伺服和微銑削技術進行鑽石切割，以製造CMLA模具。通過塌陷過程產生曲面的玻璃基板。然後通過使用moluld將聚合物壓在玻璃基板上來製備聚合物對玻璃CMLA。這種方法可以顯著降低成型壓力，並提供更好的成型性。

關鍵字

曲面轉印 ； 微透鏡陣列 ； 矽膠

並列摘要

Owing to the fast development in opto-electronic, semiconductor, components of high precision and customized shapes are in great demand. The optical components have evolved from planar, spherical, aspheric to free-form geometries. As the demand for precision optical components with complex shape and small feature size steadily increasing, numerous efforts have been made in developing new techniques and in improving the existing approaches to efficiently and economically produce those components. On top of being small and light, micro-lens array(MLA) and curved micro lens array(CMLA) can offer some extra 3D information which the ordinary single lens system is lack of. As a result, MLA plays an important role in systems such as light field camera, Wafer Level Optics and Pico projector. In comparison to single-lens system CMLA works as a compound eyes and offers a versatile morphology with panoramic field of view (FOV). However, the free-form shapes of CMLA make them rather difficult to machine and to form. Things get even tougher when those CMLAs are to be made of glass. Glass moulding process (GMP) is one of these methods to enable mass production of precision glass optical components in recent years. One of the major obstacles in GMP is precision mould fabrication. Since the mould are normally made of hard and brittle materials such as tungsten carbide (WC), precision machining of these moulds to a super finished surface and sub-mico-meter form accuracy are extremely difficult especially in case of CMLA. This research aimed to study on the fabrication processes of polymer-on-glass CMLA. Nickel is chemical plated on stainless moulds and subsequently diamond turned with slow tool servo and micro-milling techniques in this research to fabricate molds of CMLA. Curved glass substrates are generated by slumping process. Polymer-on-glass CMLAs are then produced by using moluld to press polymer against glass substrate. This approach can dramatically reduce the forming pressure and offers much better formability.

並列關鍵字

Surface transfer ； Microlens array ； Silicone

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