新型微光學透鏡之製造及整合

Fabrication and Integration of A Novel Micro Lens

李智群(Chih-Chun Lee)

指導教授 ： 方維倫

國立清華大學/工學院/動力機械工程學系/碩士(2008年)

https://doi.org/10.6843/NTHU.2008.00300

摘要

在微光機電系統中，由於製程及材料的限制，例如雷射二極體、光檢測器、微透鏡等光學元件，通常以SiP(System in Package) 的方式進行整合。而微光學平台，SiOB(Silicon Optical Bench)，的研發瓶頸主要在於半導體製程技術多為二維平面上的加工方法，利用微影製造技術不易達成三維光路配置，且三維空間中微光學元件組裝不易，對準誤差大。
本研究提出新型固態光學透鏡點膠製程，將液態的高分子材料注入另一液態介質中，利用表面張力成形後固化，可製造出200μm~600μm的球透鏡，其優點為低製造成本，生產時程極短，同時具備極佳的光學品質。透過製程整合實現SiOB，更可發揮固態透鏡以液態成形與微結構自對準的特色。本研究亦將此製程應用於微條碼掃瞄器中，以驗證其製程及整合優勢。

關鍵字

微光學平台 ； 高分子微透鏡 ； 條碼掃瞄器

並列摘要

Generally, the integration of the geometrical optical component with micro system is difficult, because the semiconductor or MEMS machining is usually two dimensional.
In this study, the polymer optical components dispensed in the buffer liquid is designed and implemented. The fully symmetric spherical lens is successfully formed in the buffer liquid. The ball lens can be used in both in-plane and out-of-plane directions. The polymer lens fabrication process provides a quick forming method for micro ball lens, with perfect surface roughness and self alignment. Moreover, the integration of such 3D polymer lens on SiOB is also demonstrated. Thus, the integration of ball lens on SiOB can be applied for various optical applications, for instance, the barcode scanner.

並列關鍵字

Silicon Optical Bench ； Polymer Lens ； Barcode Scanner

參考文獻

[1] Y. Fu, N. K. A. Bryan, and O. N. Shing, "Integrated micro-cylindrical lens with laser diode for single-modefiber coupling," Photonics Technology Letters, IEEE, vol. 12, pp. 1213-1215, 2000.

[2] J. S. Leggatt and M. C. Hutley, "Microlens arrays for interconnection of singlemode fibre arrays," Electronics Letters, vol. 27, pp. 238-240, 1991.

[5] L. Y. Lin, S. S. Lee, K. S. J. Pister, and M. C. Wu, "Three-dimensional micro-Fresnel optical elements fabricated bymicromachining technique," Electronics Letters, vol. 30, pp. 448-449, 1994.

[6] P. Heremans, J. Genoe, M. Kujik, R. Vounckx, G. Borghs, and L. Imec, "Mushroom microlenses: optimized microlenses by reflow of multiplelayers of photoresist," Photonics Technology Letters, IEEE, vol. 9, pp. 1367-1369, 1997.

[7] H. S. Alhokail, "Fabrication of photoresist microlens arrays," Microelectronics, 1998. ICM'98. Proceedings of the Tenth International Conference on, pp. 49-52, 1998.